Inventor · disambiguated record
Etsurou Morita
Also filed as: MORITA ETSUROU
13 granted patents·1 pending application·130 citations·filing 2005–2010
91Inventor score
Top patents by PatentIndex Score
14 records- 0195US7354844B2Method for manufacturing SOI substrateSUMCO CORP·Filed 2006·Granted Apr 8, 2008·43 cites·9 claims
- 0292US7781309B2Method for manufacturing direct bonded SOI wafer and direct bonded SOI wafer manufactured by the methodSUMCO CORP·Filed 2006·Granted Aug 24, 2010·30 cites·20 claims
- 0386US7364984B2Method for manufacturing SOI substrateSUMCO CORP·Filed 2007·Granted Apr 29, 2008·12 cites·8 claims
- 0484US7960225B1Method of controlling film thinning of semiconductor wafer for solid-state image sensing deviceSUMCO CORP·Filed 2010·Granted Jun 14, 2011·4 cites·6 claims
- 0581US8110486B2Method of manufacturing semiconductor wafer by forming a strain relaxation SiGe layer on an insulating layer of SOI waferMATSUMOTO KOJI·Filed 2007·Granted Feb 7, 2012·10 cites·3 claims
- 0679US7416960B2Method for manufacturing SOI substrateSUMCO CORP·Filed 2007·Granted Aug 26, 2008·7 cites·7 claims
- 0778US7855129B2Method for manufacturing direct bonded SOI wafer and direct bonded SOI wafer manufactured by the methodSUMCO CORP·Filed 2010·Granted Dec 21, 2010·5 cites·2 claims
- 0877US7736998B2Silicon-on insulator substrate and method for manufacturing the sameSUMCO CORP·Filed 2005·Granted Jun 15, 2010·11 cites·7 claims
- 0971US8284395B2Wafer surface measuring apparatusKAMIYAMA EIJI·Filed 2010·Granted Oct 9, 2012·3 cites·10 claims
- 1063US7718507B2Bonded wafer and method of producing the sameSUMCO CORP·Filed 2007·Granted May 18, 2010·4 cites·9 claims
- 1156US7829436B2Process for regeneration of a layer transferred wafer and regenerated layer transferred waferSUMCO CORP·Filed 2006·Granted Nov 9, 2010·1 cites·15 claims
- 1246US8048769B2Method for producing bonded waferSUMCO CORP·Filed 2007·Granted Nov 1, 2011·0 cites·16 claims
- 1341US7951716B2Wafer and method of producing the sameSUMCO CORP·Filed 2007·Granted May 31, 2011·0 cites·9 claims
- 1441US2007148917A1Process for Regeneration of a Layer Transferred Wafer and Regenerated Layer Transferred WaferSUMCO CORP·Filed 2006·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →