Inventor · disambiguated record
Peter Cirigliano
Also filed as: CIRIGLIANO PETER
15 granted patents·2 pending applications·182 citations·filing 2001–2012
93Inventor score
Top patents by PatentIndex Score
17 records- 0193US8080168B2Confinement ring driveCIRIGLIANO PETER·Filed 2008·Granted Dec 20, 2011·30 cites·5 claims
- 0290US7695632B2Critical dimension reduction and roughness controlLAM RES CORP·Filed 2005·Granted Apr 13, 2010·14 cites·18 claims
- 0389US7910489B2Infinitely selective photoresist mask etchLAM RES CORP·Filed 2006·Granted Mar 22, 2011·16 cites·10 claims
- 0489US7364623B2Confinement ring driveLAM RES CORP·Filed 2005·Granted Apr 29, 2008·13 cites·9 claims
- 0587US8268118B2Critical dimension reduction and roughness controlLEE SANGHEON·Filed 2010·Granted Sep 18, 2012·8 cites·5 claims
- 0687US7772122B2Sidewall forming processesLAM RES CORP·Filed 2008·Granted Aug 10, 2010·11 cites·22 claims
- 0782US7294580B2Method for plasma stripping using periodic modulation of gas chemistry and hydrocarbon additionLAM RES CORP·Filed 2004·Granted Nov 13, 2007·29 cites·20 claims
- 0879US7682516B2Vertical profile fixingLAM RES CORP·Filed 2005·Granted Mar 23, 2010·6 cites·20 claims
- 0977US8614149B2Critical dimension reduction and roughness controlLEE SANGHEON·Filed 2012·Granted Dec 24, 2013·3 cites·18 claims
- 1075US6909195B2Trench etch process for low-k dielectricsLAM RES CORP·Filed 2004·Granted Jun 21, 2005·16 cites·5 claims
- 1174US6780569B1Post-development treatment of patterned photoresist to promote cross-linking of polymer chainsLAM RES CORP·Filed 2002·Granted Aug 24, 2004·13 cites·18 claims
- 1272US7491647B2Etch with striation controlLAM RES CORP·Filed 2005·Granted Feb 17, 2009·3 cites·18 claims
- 1372US6794293B2Trench etch process for low-k dielectricsLAM RES CORP·Filed 2001·Granted Sep 21, 2004·14 cites·19 claims
- 1459US7396769B2Method for stripping photoresist from etched waferLAM RES CORP·Filed 2004·Granted Jul 8, 2008·6 cites·16 claims
- 1555US2009121324A1Etch with striation controlLAM RES CORP·Filed 2009·Application pending·0 cites
- 1651US8491750B2Adjustable confinement ring assemblyCIRIGLIANO PETER·Filed 2011·Granted Jul 23, 2013·0 cites·16 claims
- 1747US2009311871A1Organic arc etch selective for immersion photoresistLAM RES CORP·Filed 2008·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →