Inventor · disambiguated record
Mike Halpin
Also filed as: HALPIN MIKE
13 granted patents·6 pending applications·3,916 citations·filing 1997–2024
95Inventor score
Top patents by PatentIndex Score
19 records- 0198US9574268B1Pulsed valve manifold for atomic layer depositionDUNN TODD·Filed 2011·Granted Feb 21, 2017·510 cites·40 claims
- 0298US7874726B2ThermocoupleASM INC·Filed 2008·Granted Jan 25, 2011·475 cites·9 claims
- 0397US10370761B2Pulsed valve manifold for atomic layer depositionASM INC·Filed 2017·Granted Aug 6, 2019·9 cites·20 claims
- 0497US9892908B2Process feed management for semiconductor substrate processingASM INC·Filed 2015·Granted Feb 13, 2018·479 cites·17 claims
- 0597US6068441ASubstrate transfer system for semiconductor processing equipmentASM INC·Filed 1997·Granted May 30, 2000·545 cites·25 claims
- 0696US6325858B1Long life high temperature process chamberASM INC·Filed 1998·Granted Dec 4, 2001·596 cites·18 claims
- 0795US9017481B1Process feed management for semiconductor substrate processingPETTINGER FRED·Filed 2011·Granted Apr 28, 2015·761 cites·6 claims
- 0895US8616765B2ThermocoupleDARABNIA BUZ·Filed 2012·Granted Dec 31, 2013·469 cites·18 claims
- 0995US7648579B2Substrate support system for reduced autodoping and backside depositionASM INC·Filed 2005·Granted Jan 19, 2010·42 cites·30 claims
- 1088US10832903B2Process feed management for semiconductor substrate processingASM IP HOLDING BV·Filed 2018·Granted Nov 10, 2020·4 cites·18 claims
- 1186US8088225B2Substrate support system for reduced autodoping and backside depositionGOODMAN MATT G·Filed 2009·Granted Jan 3, 2012·17 cites·13 claims
- 1275US8262287B2ThermocoupleDARABNIA BUZ·Filed 2008·Granted Sep 11, 2012·9 cites·22 claims
- 1356US2025123174A1Thermocouple leak detectionHELIOS TECHNICAL SERVICES LLC·Filed 2022·Application pending·0 cites
- 1451US2025114953A1Transfer armHELIOS TECHNICAL SERVICES LLC·Filed 2024·Application pending·0 cites
- 1548US2024222149A1Injector for a semiconductor fabrication toolHELIOS TECHNICAL SERVICES LLC·Filed 2023·Application pending·0 cites
- 1648US2010107974A1Substrate holder with varying densityASM INC·Filed 2008·Application pending·0 cites
- 1745US10589354B2Systems and methods for depositing charged metal droplets onto a workpiece3DAM TECH LLC·Filed 2017·Granted Mar 17, 2020·0 cites·19 claims
- 1845US2009052498A1ThermocoupleASM INC·Filed 2008·Application pending·0 cites
- 1943US2025116323A1Anti backlash adjustment mechanism for gearsHELIOS TECHNICAL SERVICES LLC·Filed 2024·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →