Inventor · disambiguated record
Allen Park
Also filed as: PARK ALLEN · PARK ALLEN S
38 granted patents·4 pending applications·599 citations·filing 2006–2022
97Inventor score
Top patents by PatentIndex Score
42 records- 0198US10456984B2Adaptive material deposition for additive manufacturingMASSACHUSETTS INST TECHNOLOGY·Filed 2017·Granted Oct 29, 2019·40 cites·18 claims
- 0298US7570796B2Methods and systems for utilizing design data in combination with inspection dataKLA TENCOR TECH CORP·Filed 2006·Granted Aug 4, 2009·286 cites·88 claims
- 0397US9401014B2Methods and systems for utilizing design data in combination with inspection dataKLA-TENCOR TECH CORP·Filed 2014·Granted Jul 26, 2016·22 cites·103 claims
- 0495US10181185B2Image based specimen process controlKLA TENCOR CORP·Filed 2017·Granted Jan 15, 2019·21 cites·35 claims
- 0595US8559001B2Inspection guided overlay metrologyCHANG ELLIS·Filed 2011·Granted Oct 15, 2013·35 cites·22 claims
- 0693US8194968B2Methods and systems for using electrical information for a device being fabricated on a wafer to perform one or more defect-related functionsPARK ALLEN·Filed 2008·Granted Jun 5, 2012·33 cites·85 claims
- 0792US9170209B1Inspection guided overlay metrologyKLA TENCOR CORP·Filed 2013·Granted Oct 27, 2015·11 cites·24 claims
- 0891US10818001B2Using stochastic failure metrics in semiconductor manufacturingKLA TENCOR CORP·Filed 2019·Granted Oct 27, 2020·13 cites·20 claims
- 0991US8923600B2Methods and systems for utilizing design data in combination with inspection dataZAFAR KHURRAM·Filed 2009·Granted Dec 30, 2014·33 cites·23 claims
- 1089US10943838B2Measurement of overlay error using device inspection systemKLA TENCOR CORP·Filed 2018·Granted Mar 9, 2021·6 cites·20 claims
- 1188US7711514B2Computer-implemented methods, carrier media, and systems for generating a metrology sampling planKLA TENCOR TECH CORP·Filed 2007·Granted May 4, 2010·19 cites·22 claims
- 1286US9087367B2Determining design coordinates for wafer defectsCHANG ELLIS·Filed 2012·Granted Jul 21, 2015·11 cites·27 claims
- 1385US10483081B2Self directed metrology and pattern classificationKLA TENCOR CORP·Filed 2016·Granted Nov 19, 2019·4 cites·37 claims
- 1485US8594823B2Scanner performance comparison and matching using design and defect dataPARK ALLEN·Filed 2010·Granted Nov 26, 2013·9 cites·12 claims
- 1583US10359371B2Determining one or more characteristics of a pattern of interest on a specimenKLA TENCOR CORP·Filed 2016·Granted Jul 23, 2019·4 cites·27 claims
- 1683US10262408B2System, method and computer program product for systematic and stochastic characterization of pattern defects identified from a semiconductor waferKLA TENCOR CORP·Filed 2017·Granted Apr 16, 2019·4 cites·19 claims
- 1782US8948495B2Inspecting a wafer and/or predicting one or more characteristics of a device being formed on a waferKLA TENCOR CORP·Filed 2013·Granted Feb 3, 2015·8 cites·37 claims
- 1881US11155040B2Adaptive material deposition for additive manufacturingMASSACHUSETTS INST TECHNOLOGY·Filed 2019·Granted Oct 26, 2021·1 cites·19 claims
- 1980US10062012B1Finding patterns in a design based on the patterns and their surroundingsKLA TENCOR CORP·Filed 2015·Granted Aug 28, 2018·4 cites·21 claims
- 2079US9536299B2Pattern failure discovery by leveraging nominal characteristics of alternating failure modesKLA TENCOR CORP·Filed 2014·Granted Jan 3, 2017·4 cites·33 claims
- 2179US7975245B2Computer-implemented methods for determining if actual defects are potentially systematic defects or potentially random defectsKLA TENCOR CORP·Filed 2008·Granted Jul 5, 2011·13 cites·13 claims
- 2277US10740888B2Computer assisted weak pattern detection and quantification systemKLA TENCOR CORP·Filed 2016·Granted Aug 11, 2020·2 cites·13 claims
- 2376US8656323B2Based device risk assessmentPARK ALLEN·Filed 2012·Granted Feb 18, 2014·4 cites·4 claims
- 2475US9518932B2Metrology optimized inspectionKLA TENCOR CORP·Filed 2014·Granted Dec 13, 2016·2 cites·37 claims
- 2570US9576861B2Method and system for universal target based inspection and metrologyKLA TENCOR CORP·Filed 2013·Granted Feb 21, 2017·2 cites·25 claims
- 2670US8826200B2Alteration for wafer inspectionKLA TENCOR CORP·Filed 2013·Granted Sep 2, 2014·2 cites·21 claims
- 2770US2022230293A1Method and system for mixed mode wafer inspectionKLA CORP·Filed 2022·Application pending·0 cites
- 2869US10262831B2Method and system for weak pattern quantificationKLA TENCOR CORP·Filed 2017·Granted Apr 16, 2019·1 cites·31 claims
- 2964US11784097B2Measurement of overlay error using device inspection systemKLA TENCOR CORP·Filed 2021·Granted Oct 10, 2023·0 cites·12 claims
- 3064US10030959B2Blasting systems and methodsPARK ALLEN·Filed 2014·Granted Jul 24, 2018·1 cites·16 claims
- 3161US11688052B2Computer assisted weak pattern detection and quantification systemKLA CORP·Filed 2020·Granted Jun 27, 2023·0 cites·10 claims
- 3261US10223492B1Based device risk assessmentKLA TENCOR CORP·Filed 2014·Granted Mar 5, 2019·1 cites·21 claims
- 3361US8989479B2Region based virtual fourier filterGAO LISHENG·Filed 2011·Granted Mar 24, 2015·3 cites·35 claims
- 3459US11295438B2Method and system for mixed mode wafer inspectionKLA TENCOR CORP·Filed 2018·Granted Apr 5, 2022·0 cites·9 claims
- 3553US11060832B2Blasting method and systemPWS SYSTEMS PTY LTD·Filed 2018·Granted Jul 13, 2021·0 cites·26 claims
- 3653US10192303B2Method and system for mixed mode wafer inspectionKLA TENCOR CORP·Filed 2013·Granted Jan 29, 2019·0 cites·34 claims
- 3751US10796065B2Hybrid design layout to identify optical proximity correction-related systematic defectsKLA TENCOR CORP·Filed 2018·Granted Oct 6, 2020·0 cites·17 claims
- 3850US2017161418A1Using three-dimensional representations for defect-related applicationsKLA TENCOR CORP·Filed 2017·Application pending·0 cites
- 3946US2012316855A1Using Three-Dimensional Representations for Defect-Related ApplicationsPARK ALLEN·Filed 2011·Application pending·0 cites
- 4044US2015120220A1Detecting IC Reliability DefectsKLA TENCOR CORP·Filed 2014·Application pending·0 cites
- 4143US9940705B2System, method and computer program product for detecting defects in a fabricated target component using consistent modulation for the target and reference componentsKLA TENCOR CORP·Filed 2016·Granted Apr 10, 2018·0 cites·19 claims
- 4240US12320626B2Gel stemming delivery systemPWS—Stemsafe JV Pty Ltd·Filed 2020·Granted Jun 3, 2025·0 cites·11 claims
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