Inventor · disambiguated record
Junji Kunisawa
Also filed as: KUNISAWA JUNJI
50 granted patents·18 pending applications·440 citations·filing 2000–2024
98Inventor score
Top patents by PatentIndex Score
68 records- 0197US6632335B2Plating apparatusEBARA CORP·Filed 2000·Granted Oct 14, 2003·114 cites·77 claims
- 0296US6558239B2Polishing apparatusEBARA CORP·Filed 2002·Granted May 6, 2003·65 cites·14 claims
- 0395US10486285B2Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding methodEBARA CORP·Filed 2017·Granted Nov 26, 2019·9 cites·10 claims
- 0493US10741423B2Substrate cleaning apparatus, substrate processing apparatus, and method of cleaning substrateEBARA CORP·Filed 2018·Granted Aug 11, 2020·9 cites·7 claims
- 0593US9358662B2Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding methodEBARA CORP·Filed 2014·Granted Jun 7, 2016·9 cites·21 claims
- 0692US8795032B2Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding methodMIYAZAKI MITSURU·Filed 2009·Granted Aug 5, 2014·22 cites·14 claims
- 0792US6689257B2Substrate processing apparatus and substrate plating apparatusEBARA CORP·Filed 2001·Granted Feb 10, 2004·54 cites·12 claims
- 0891US7108589B2Polishing apparatus and methodTOSHIBA KK·Filed 2005·Granted Sep 19, 2006·14 cites·12 claims
- 0989US7055535B2Holding unit, processing apparatus and holding method of substratesEBARA CORP·Filed 2003·Granted Jun 6, 2006·38 cites·11 claims
- 1087US8029653B2Electroplating apparatus and electroplating methodEBARA CORP·Filed 2007·Granted Oct 4, 2011·13 cites·7 claims
- 1186US11380559B2Carrier device, work processing apparatus, control method of carrier device and storage medium storing programEBARA CORP·Filed 2020·Granted Jul 5, 2022·2 cites·18 claims
- 1284US7585205B2Substrate polishing apparatus and methodEBARA CORP·Filed 2007·Granted Sep 8, 2009·7 cites·23 claims
- 1383US7736474B2Plating apparatus and plating methodEBARA CORP·Filed 2005·Granted Jun 15, 2010·8 cites·4 claims
- 1482US9269605B2Substrate gripping apparatusEBARA CORP·Filed 2014·Granted Feb 23, 2016·4 cites·14 claims
- 1580US11426834B2Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding methodEBARA CORP·Filed 2019·Granted Aug 30, 2022·1 cites·2 claims
- 1679US6722964B2Polishing apparatus and methodEBARA CORP·Filed 2001·Granted Apr 20, 2004·17 cites·33 claims
- 1775US9673067B2Substrate processing apparatus and processed substrate manufacturing methodEBARA CORP·Filed 2014·Granted Jun 6, 2017·3 cites·10 claims
- 1875US7901550B2Plating apparatusEBARA CORP·Filed 2007·Granted Mar 8, 2011·5 cites·3 claims
- 1973US10575697B2Substrate cleaning apparatus and substrate processing apparatusEBARA CORP·Filed 2018·Granted Mar 3, 2020·1 cites·10 claims
- 2071US6935932B2Polishing apparatus and methodTOSHIBA KK·Filed 2004·Granted Aug 30, 2005·10 cites·7 claims
- 2169US12447449B2Chemical supply apparatus, cleaning system, and chemical supply methodEBARA CORP·Filed 2023·Granted Oct 21, 2025·0 cites·11 claims
- 2268US10573509B2Cleaning apparatus and substrate processing apparatusEBARA CORP·Filed 2017·Granted Feb 25, 2020·1 cites·11 claims
- 2368US7387717B2Method of performing electrolytic treatment on a conductive layer of a substrateEBARA CORP·Filed 2003·Granted Jun 17, 2008·3 cites·13 claims
- 2468US7208074B2Substrate processing apparatus and substrate plating apparatusEBARA CORP·Filed 2003·Granted Apr 24, 2007·9 cites·3 claims
- 2566US9530676B2Substrate processing apparatus, substrate transfer method and substrate transfer deviceYOKOYAMA TOSHIO·Filed 2012·Granted Dec 27, 2016·2 cites·9 claims
- 2664US10361101B2Substrate cleaning apparatus and substrate processing apparatus XEBARA CORP·Filed 2017·Granted Jul 23, 2019·1 cites·8 claims
- 2764US7976362B2Substrate polishing apparatus and methodEBARA CORP·Filed 2009·Granted Jul 12, 2011·1 cites·17 claims
- 2863US11532491B2Substrate cleaning apparatus, substrate processing apparatus, and method of cleaning substrateEBARA CORP·Filed 2020·Granted Dec 20, 2022·0 cites·5 claims
- 2963US6767437B2Electroplating apparatus and electroplating methodTOSHIBA KK·Filed 2001·Granted Jul 27, 2004·3 cites·14 claims
- 3062US10500691B2Substrate processing apparatus and substrate processing methodEBARA CORP·Filed 2017·Granted Dec 10, 2019·0 cites·18 claims
- 3162US6746589B2Plating method and plating apparatusEBARA CORP·Filed 2001·Granted Jun 8, 2004·9 cites·16 claims
- 3261US9687957B2Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding methodEBARA CORP·Filed 2014·Granted Jun 27, 2017·0 cites·29 claims
- 3361US6858084B2Plating apparatus and methodEBARA CORP·Filed 2001·Granted Feb 22, 2005·6 cites·8 claims
- 3461US2024416390A1Substrate processing apparatusEBARA CORP·Filed 2024·Application pending·0 cites
- 3560US10926301B2Liquid supplying device and liquid supplying methodEBARA CORP·Filed 2019·Granted Feb 23, 2021·0 cites·7 claims
- 3657US2008251385A1Plating apparatusKUNISAWA JUNJI·Filed 2008·Application pending·0 cites
- 3757US2008296165A1Plating apparatusKUNISAWA JUNJI·Filed 2008·Application pending·0 cites
- 3856US10343192B2Liquid supplying device and liquid supplying methodEBARA CORP·Filed 2018·Granted Jul 9, 2019·0 cites·3 claims
- 3952US11967508B2Damper control system and damper control methodEBARA CORP·Filed 2020·Granted Apr 23, 2024·0 cites·6 claims
- 4052US9892953B2Substrate gripping apparatusEBARA CORP·Filed 2016·Granted Feb 13, 2018·0 cites·13 claims
- 4151US12208428B2Liquid supplying device and method for draining liquid thereofEBARA CORP·Filed 2020·Granted Jan 28, 2025·0 cites·6 claims
- 4251US11890652B2Cleaning chemical liquid supply device and cleaning chemical liquid supply methodEBARA CORP·Filed 2021·Granted Feb 6, 2024·0 cites·7 claims
- 4351US11664252B2Cleaning device, polishing device, and device and method for calculating rotation speed of substrate in cleaning deviceEBARA CORP·Filed 2020·Granted May 30, 2023·0 cites·22 claims
- 4448US2005155865A1Electrolytic processing apparatus and methodFiled 2004·Application pending·0 cites
- 4548US2005023149A1Plating apparatus, plating method and substrate processing apparatusFiled 2004·Application pending·0 cites
- 4647US2011237163A1Substrate polishing apparatus and methodKATSUOKA SEIJI·Filed 2011·Application pending·0 cites
- 4746US12140980B2Apparatus for supplying liquid, cleaning unit, and apparatus for processing substrateEBARA CORP·Filed 2020·Granted Nov 12, 2024·0 cites·16 claims
- 4846US7442282B2Electrolytic processing apparatus and methodEBARA CORP·Filed 2003·Granted Oct 28, 2008·0 cites·21 claims
- 4946US2015221536A1Substrate processing apparatus, substrate transfer method and substrate transfer deviceEBARA CORP·Filed 2015·Application pending·0 cites
- 5044US11103972B2Buff processing device and substrate processing deviceEBARA CORP·Filed 2016·Granted Aug 31, 2021·0 cites·12 claims
Showing the top 50 of 68 patent records by PatentIndex Score.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →