Inventor · disambiguated record
Eric P. Solecky
Also filed as: SOLECKY ERIC · SOLECKY ERIC P · SOLECKY ERIC PETER
30 granted patents·1 pending application·275 citations·filing 1997–2012
96Inventor score
Top patents by PatentIndex Score
31 records- 0192US6025600AMethod for astigmatism correction in charged particle beam systemsIBM·Filed 1998·Granted Feb 15, 2000·73 cites·27 claims
- 0282US9652729B2Metrology managementHOFFMAN JR WILLIAM K·Filed 2011·Granted May 16, 2017·14 cites·17 claims
- 0382US7487054B2Automated dynamic metrology sampling system and method for process controlIBM·Filed 2005·Granted Feb 3, 2009·9 cites·7 claims
- 0480US7340374B2Determining fleet matching problem and root cause issue for measurement systemIBM·Filed 2005·Granted Mar 4, 2008·5 cites·23 claims
- 0579US7065425B1Metrology tool error log analysis methodology and systemINTERNAITONAL BUSINESS MACHINE·Filed 2005·Granted Jun 20, 2006·11 cites·20 claims
- 0677US7397252B2Measurement of critical dimension and quantification of electron beam size at real time using electron beam induced currentIBM·Filed 2006·Granted Jul 8, 2008·4 cites·9 claims
- 0777US7353128B2Measurement system optimizationIBM·Filed 2006·Granted Apr 1, 2008·8 cites·27 claims
- 0874US7305320B2Metrology tool recipe validator using best known methodsIBM·Filed 2006·Granted Dec 4, 2007·8 cites·20 claims
- 0974US6407396B1Wafer metrology structureIBM·Filed 1999·Granted Jun 18, 2002·45 cites·22 claims
- 1074US5969273AMethod and apparatus for critical dimension and tool resolution determination using edge widthIBM·Filed 1998·Granted Oct 19, 1999·51 cites·19 claims
- 1169US7467063B2Determining fleet matching problem and root cause issue for measurement systemIBM·Filed 2007·Granted Dec 16, 2008·4 cites·25 claims
- 1267US7700946B2Structure for reducing prior level edge interference with critical dimension measurementIBM·Filed 2008·Granted Apr 20, 2010·2 cites·4 claims
- 1366US7831395B2Quantification of adsorbed molecular contaminant using thin film measurementIBM·Filed 2008·Granted Nov 9, 2010·1 cites·7 claims
- 1466US7645620B2Method and structure for reducing prior level edge interference with critical dimension measurementIBM·Filed 2005·Granted Jan 12, 2010·2 cites·8 claims
- 1566US7532999B2Determining root cause of matching problem and/or fleet measurement precision problem for measurement systemIBM·Filed 2005·Granted May 12, 2009·5 cites·27 claims
- 1662US7716009B2Metrology tool recipe validator using best known methodsIBM·Filed 2007·Granted May 11, 2010·3 cites·12 claims
- 1762US7187993B2Metrology tool error log analysis methodology and systemIBM·Filed 2006·Granted Mar 6, 2007·3 cites·20 claims
- 1861US8855401B2Methods and systems involving measuring complex dimensions of silicon devicesARCHIE CHARLES N·Filed 2010·Granted Oct 7, 2014·3 cites·20 claims
- 1961US8467993B2Measurement tool monitoring using fleet measurement precision and tool matching precision analysisARCHIE CHARLES·Filed 2010·Granted Jun 18, 2013·2 cites·20 claims
- 2061US6789033B2Apparatus and method for characterizing features at small dimensionsIBM·Filed 2001·Granted Sep 7, 2004·8 cites·30 claims
- 2155US7881891B2Automated dynamic metrology sampling system and method for process controlIBM·Filed 2009·Granted Feb 1, 2011·0 cites·12 claims
- 2255US7369947B2Quantification of adsorbed molecular contaminant using thin film measurementIBM·Filed 2006·Granted May 6, 2008·0 cites·4 claims
- 2351US7358130B2Method for monitoring lateral encroachment of spacer process on a CD SEMIBM·Filed 2006·Granted Apr 15, 2008·0 cites·7 claims
- 2450US7485859B2Charged beam apparatus and method that provide charged beam aerial dimensional mapIBM·Filed 2007·Granted Feb 3, 2009·0 cites·8 claims
- 2549US7571070B2Measurement system fleet optimizationIBM·Filed 2006·Granted Aug 4, 2009·1 cites·20 claims
- 2644US8450120B2SEM repair for sub-optimal featuresSIEG STUART A·Filed 2012·Granted May 28, 2013·0 cites·11 claims
- 2744US8211717B1SEM repair for sub-optimal featuresSIEG STUART A·Filed 2011·Granted Jul 3, 2012·0 cites·10 claims
- 2844US7105398B2Method for monitoring lateral encroachment of spacer process on a CD SEMIBM·Filed 2004·Granted Sep 12, 2006·0 cites·11 claims
- 2943US7479396B2Structure, system and method for dimensionally unstable layer dimension measurementIBM·Filed 2005·Granted Jan 20, 2009·0 cites·1 claims
- 3043US6185323B1Method characterizing a feature using measurement imaging toolIBM·Filed 1997·Granted Feb 6, 2001·13 cites·24 claims
- 3140US2008138986A1Mask layer trim method using charged particle beam exposureIBM·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →