Inventor · disambiguated record
Charles N. Archie
Also filed as: ARCHIE CHARLES · ARCHIE CHARLES N · ARCHIE CHARLES NEILL
25 granted patents·313 citations·filing 1997–2015
96Inventor score
Top patents by PatentIndex Score
25 records- 0193US6472662B1Automated method for determining several critical dimension properties from scanning electron microscope by using several tilted beam or sample scansIBM·Filed 2000·Granted Oct 29, 2002·65 cites·17 claims
- 0292US7286247B2Assessment and optimization for metrology instrument including uncertainty of total measurement uncertaintyIBM·Filed 2005·Granted Oct 23, 2007·22 cites·30 claims
- 0392US6025600AMethod for astigmatism correction in charged particle beam systemsIBM·Filed 1998·Granted Feb 15, 2000·73 cites·27 claims
- 0480US7340374B2Determining fleet matching problem and root cause issue for measurement systemIBM·Filed 2005·Granted Mar 4, 2008·5 cites·23 claims
- 0577US7353128B2Measurement system optimizationIBM·Filed 2006·Granted Apr 1, 2008·8 cites·27 claims
- 0674US7305320B2Metrology tool recipe validator using best known methodsIBM·Filed 2006·Granted Dec 4, 2007·8 cites·20 claims
- 0774US5969273AMethod and apparatus for critical dimension and tool resolution determination using edge widthIBM·Filed 1998·Granted Oct 19, 1999·51 cites·19 claims
- 0873US7265850B2Fortified, compensated and uncompensated process-sensitive scatterometry targetsIBM·Filed 2003·Granted Sep 4, 2007·13 cites·13 claims
- 0972US6683305B1Method to obtain transparent image of resist contact hole or feature by SEM without deforming the feature by ion beamIBM·Filed 2002·Granted Jan 27, 2004·11 cites·14 claims
- 1069US7467063B2Determining fleet matching problem and root cause issue for measurement systemIBM·Filed 2007·Granted Dec 16, 2008·4 cites·25 claims
- 1166US7532999B2Determining root cause of matching problem and/or fleet measurement precision problem for measurement systemIBM·Filed 2005·Granted May 12, 2009·5 cites·27 claims
- 1264US7453583B2Assessment and optimization for metrology instrument including uncertainty of total measurement uncertaintyIBM·Filed 2007·Granted Nov 18, 2008·2 cites·25 claims
- 1362US7716009B2Metrology tool recipe validator using best known methodsIBM·Filed 2007·Granted May 11, 2010·3 cites·12 claims
- 1462US7352478B2Assessment and optimization for metrology instrumentIBM·Filed 2002·Granted Apr 1, 2008·8 cites·18 claims
- 1561US8855401B2Methods and systems involving measuring complex dimensions of silicon devicesARCHIE CHARLES N·Filed 2010·Granted Oct 7, 2014·3 cites·20 claims
- 1661US8467993B2Measurement tool monitoring using fleet measurement precision and tool matching precision analysisARCHIE CHARLES·Filed 2010·Granted Jun 18, 2013·2 cites·20 claims
- 1761US6789033B2Apparatus and method for characterizing features at small dimensionsIBM·Filed 2001·Granted Sep 7, 2004·8 cites·30 claims
- 1858US7479633B2Methodology for critical dimension metrology using stepper focus monitor informationIBM·Filed 2001·Granted Jan 20, 2009·5 cites·26 claims
- 1953US7760360B2Monitoring a photolithographic process using a scatterometry targetIBM·Filed 2007·Granted Jul 20, 2010·0 cites·9 claims
- 2051US7791723B2Optical measurement using fixed polarizerIBM·Filed 2008·Granted Sep 7, 2010·0 cites·18 claims
- 2151US7094616B2High resolution cross-sectioning of polysilicon features with a dual beam toolIBM·Filed 2004·Granted Aug 22, 2006·3 cites·16 claims
- 2249US7571070B2Measurement system fleet optimizationIBM·Filed 2006·Granted Aug 4, 2009·1 cites·20 claims
- 2345US7688456B2Assessment and optimization for metrology instrumentIBM·Filed 2008·Granted Mar 30, 2010·0 cites·10 claims
- 2443US6185323B1Method characterizing a feature using measurement imaging toolIBM·Filed 1997·Granted Feb 6, 2001·13 cites·24 claims
- 2536US10222710B2Method and system for planning metrology measurementsNOVA MEASURING INSTR LTD·Filed 2015·Granted Mar 5, 2019·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →