Inventor · disambiguated record
Michael Adel
Also filed as: ADEL MICHAEL · ADEL MICHAEL E
83 granted patents·3 pending applications·3,157 citations·filing 1993–2024
99Inventor score
Files withKLA TENCOR TECH CORP36KLA TENCOR CORP23ADEL MICHAEL5APPLIED SPECTRAL IMAGING LTD5KLA CORP3
Top patents by PatentIndex Score
86 records- 0198US7440105B2Continuously varying offset mark and methods of determining overlayKLA TENCOR TECH CORP·Filed 2005·Granted Oct 21, 2008·93 cites·12 claims
- 0298US6556853B1Spectral bio-imaging of the eyeAPPLIED SPECTRAL IMAGING LTD·Filed 1998·Granted Apr 29, 2003·477 cites·23 claims
- 0397US9347879B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR CORP·Filed 2015·Granted May 24, 2016·17 cites·21 claims
- 0497US8330281B2Overlay marks, methods of overlay mark design and methods of overlay measurementsGHINOVKER MARK·Filed 2007·Granted Dec 11, 2012·43 cites·9 claims
- 0597US7433040B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2007·Granted Oct 7, 2008·28 cites·18 claims
- 0697US7317824B2Overlay marks, methods of overlay mark design and methods of overlay measurementsKLA TENCOR TECH CORP·Filed 2006·Granted Jan 8, 2008·22 cites·60 claims
- 0797US7317531B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2003·Granted Jan 8, 2008·83 cites·30 claims
- 0897US7242477B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2004·Granted Jul 10, 2007·124 cites·20 claims
- 0997US6985618B2Overlay marks, methods of overlay mark design and methods of overlay measurementsKLA TENCOR TECH CORP·Filed 2002·Granted Jan 10, 2006·98 cites·41 claims
- 1096US9116442B2Feedforward/feedback litho process control of stress and overlayADEL MICHAEL·Filed 2011·Granted Aug 25, 2015·18 cites·38 claims
- 1196US7571422B2Method for generating a design rule map having spatially varying overlay budgetKLA TENCOR TECH CORP·Filed 2007·Granted Aug 4, 2009·36 cites·16 claims
- 1296US7566517B1Feature printability optimization by optical toolKLA TENCOR TECH CORP·Filed 2005·Granted Jul 28, 2009·28 cites·19 claims
- 1396US7564557B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2007·Granted Jul 21, 2009·19 cites·7 claims
- 1496US7557921B1Apparatus and methods for optically monitoring the fidelity of patterns produced by photolitographic toolsKLA TENCOR TECH CORP·Filed 2005·Granted Jul 7, 2009·55 cites·14 claims
- 1596US7298481B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2004·Granted Nov 20, 2007·46 cites·11 claims
- 1696US7289213B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2004·Granted Oct 30, 2007·49 cites·15 claims
- 1796US7280212B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2004·Granted Oct 9, 2007·45 cites·12 claims
- 1896US6928628B2Use of overlay diagnostics for enhanced automatic process controlKLA TENCOR TECH CORP·Filed 2003·Granted Aug 9, 2005·141 cites·21 claims
- 1996US6921916B2Overlay marks, methods of overlay mark design and methods of overlay measurementsKLA TENOCOR TECHNOLOGIES CORP·Filed 2002·Granted Jul 26, 2005·122 cites·27 claims
- 2095US7933016B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2009·Granted Apr 26, 2011·15 cites·20 claims
- 2195US7876440B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2009·Granted Jan 25, 2011·13 cites·18 claims
- 2295US7671990B1Cross hatched metrology marks and associated method of useKLA TENCOR TECH CORP·Filed 2007·Granted Mar 2, 2010·40 cites·8 claims
- 2395US7663753B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2007·Granted Feb 16, 2010·19 cites·45 claims
- 2495US7608468B1Apparatus and methods for determining overlay and uses of sameKLA TENCOR TECH CORP·Filed 2004·Granted Oct 27, 2009·75 cites·23 claims
- 2594US10451412B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR CORP·Filed 2017·Granted Oct 22, 2019·7 cites·14 claims
- 2694US8214771B2Scatterometry metrology target design optimizationADEL MICHAEL·Filed 2009·Granted Jul 3, 2012·32 cites·25 claims
- 2794US8111376B2Feedforward/feedback litho process control of stress and overlayADEL MICHAEL·Filed 2008·Granted Feb 7, 2012·20 cites·33 claims
- 2894US7528941B2Order selected overlay metrologyKLA TENCOR TECHNOLGIES CORP·Filed 2007·Granted May 5, 2009·40 cites·27 claims
- 2994US7385699B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2004·Granted Jun 10, 2008·34 cites·33 claims
- 3094US7310789B2Use of overlay diagnostics for enhanced automatic process controlKLA TENCOR TECH CORP·Filed 2006·Granted Dec 18, 2007·20 cites·33 claims
- 3194US7301634B2Apparatus and methods for detecting overlay errors using scatterometryKLA TENCOR TECH CORP·Filed 2004·Granted Nov 27, 2007·35 cites·33 claims
- 3294US7177457B2Overlay marks, methods of overlay mark design and methods of overlay measurementsKLA TENCOR CORP·Filed 2002·Granted Feb 13, 2007·33 cites·36 claims
- 3394US7068833B1Overlay marks, methods of overlay mark design and methods of overlay measurementsKLA TENCOR CORP·Filed 2001·Granted Jun 27, 2006·81 cites·38 claims
- 3493US9702693B2Apparatus for measuring overlay errorsKLA TENCOR CORP·Filed 2016·Granted Jul 11, 2017·6 cites·64 claims
- 3593US8908175B1Flexible scatterometry metrology system and methodKANDEL DANIEL·Filed 2006·Granted Dec 9, 2014·26 cites·36 claims
- 3693US7879627B2Overlay marks and methods of manufacturing such marksKLA TENCOR TECH CORP·Filed 2009·Granted Feb 1, 2011·25 cites·12 claims
- 3793US6419361B2Spectral bio-imaging of the eyeAPPLIED SPECTRAL IMAGING LTD·Filed 2001·Granted Jul 16, 2002·94 cites·4 claims
- 3893US6142629ASpectral imaging using illumination of preselected spectral contentAPPLIED SPECTRAL IMAGING LTD·Filed 1998·Granted Nov 7, 2000·139 cites·65 claims
- 3992US7876438B2Apparatus and methods for determining overlay and uses of sameKLA TENCOR TECH CORP·Filed 2009·Granted Jan 25, 2011·31 cites·20 claims
- 4092US7804994B2Overlay metrology and control methodKLA TENCOR TECH CORP·Filed 2003·Granted Sep 28, 2010·54 cites·16 claims
- 4191US7368208B1Measuring phase errors on phase shift masksKLA TENCOR TECH CORP·Filed 2006·Granted May 6, 2008·12 cites·12 claims
- 4290US9151712B1Rule checking for metrology and inspectionADEL MICHAEL·Filed 2008·Granted Oct 6, 2015·16 cites·38 claims
- 4390US8142966B2Substrate matrix to decouple tool and process effectsIZIKSON PAVEL·Filed 2009·Granted Mar 27, 2012·16 cites·20 claims
- 4490US7355291B2Overlay marks, methods of overlay mark design and methods of overlay measurementsKLA TENCOR TECH CORP·Filed 2005·Granted Apr 8, 2008·13 cites·17 claims
- 4590US7352451B2System method and structure for determining focus accuracyKLA TENCOR CORP·Filed 2005·Granted Apr 1, 2008·12 cites·8 claims
- 4690US7346878B1Apparatus and methods for providing in-chip microtargets for metrology or inspectionKLA TENCOR TECH CORP·Filed 2004·Granted Mar 18, 2008·65 cites·53 claims
- 4789US10387608B2Metrology target identification, design and verificationKLA TENCOR CORP·Filed 2017·Granted Aug 20, 2019·6 cites·38 claims
- 4889US9903711B2Feed forward of metrology data in a metrology systemKLA TENCOR CORP·Filed 2016·Granted Feb 27, 2018·5 cites·33 claims
- 4989US8456641B1Optical systemLEVINSKI VLADIMIR·Filed 2011·Granted Jun 4, 2013·9 cites·13 claims
- 5089US7274814B2Overlay marks, methods of overlay mark design and methods of overlay measurementsKLA TENCOR CORP·Filed 2006·Granted Sep 25, 2007·18 cites·27 claims
Showing the top 50 of 86 patent records by PatentIndex Score.
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