Inventor · disambiguated record
Joel Seligson
Also filed as: SELIGSON JOEL · SELIGSON JOEL L
26 granted patents·849 citations·filing 1987–2017
97Inventor score
Top patents by PatentIndex Score
26 records- 0198US7440105B2Continuously varying offset mark and methods of determining overlayKLA TENCOR TECH CORP·Filed 2005·Granted Oct 21, 2008·93 cites·12 claims
- 0297US8441639B2Metrology systems and methodsKANDEL DANIEL·Filed 2010·Granted May 14, 2013·35 cites·22 claims
- 0396US9080971B2Metrology systems and methodsKLA TENCOR CORP·Filed 2014·Granted Jul 14, 2015·21 cites·12 claims
- 0496US6928628B2Use of overlay diagnostics for enhanced automatic process controlKLA TENCOR TECH CORP·Filed 2003·Granted Aug 9, 2005·141 cites·21 claims
- 0595US7608468B1Apparatus and methods for determining overlay and uses of sameKLA TENCOR TECH CORP·Filed 2004·Granted Oct 27, 2009·75 cites·23 claims
- 0694US8873054B2Metrology systems and methodsKLA TENCOR CORP·Filed 2013·Granted Oct 28, 2014·14 cites·26 claims
- 0794US7528941B2Order selected overlay metrologyKLA TENCOR TECHNOLGIES CORP·Filed 2007·Granted May 5, 2009·40 cites·27 claims
- 0894US7310789B2Use of overlay diagnostics for enhanced automatic process controlKLA TENCOR TECH CORP·Filed 2006·Granted Dec 18, 2007·20 cites·33 claims
- 0993US9104120B2Structured illumination for contrast enhancement in overlay metrologySELIGSON JOEL·Filed 2012·Granted Aug 11, 2015·13 cites·25 claims
- 1093US8908175B1Flexible scatterometry metrology system and methodKANDEL DANIEL·Filed 2006·Granted Dec 9, 2014·26 cites·36 claims
- 1193US8896832B2Discrete polarization scatterometryHILL ANDREW V·Filed 2011·Granted Nov 25, 2014·25 cites·35 claims
- 1293US8681413B2Illumination controlMANASSEN AMNON·Filed 2011·Granted Mar 25, 2014·18 cites·42 claims
- 1392US7876438B2Apparatus and methods for determining overlay and uses of sameKLA TENCOR TECH CORP·Filed 2009·Granted Jan 25, 2011·31 cites·20 claims
- 1491US6172349B1Autofocusing apparatus and method for high resolution microscope systemKLA TENCOR CORP·Filed 1997·Granted Jan 9, 2001·150 cites·30 claims
- 1591US4805038AImaging apparatus which includes a light-valve array having electrostatically deflectable elementsEASTMAN KODAK CO·Filed 1987·Granted Feb 14, 1989·75 cites·15 claims
- 1689US8582114B2Overlay metrology by pupil phase analysisMANASSEN AMNON·Filed 2011·Granted Nov 12, 2013·7 cites·23 claims
- 1786US9164397B2Optics symmetrization for metrologyMANASSEN AMNON·Filed 2011·Granted Oct 20, 2015·7 cites·15 claims
- 1883US7602491B2Optical gain approach for enhancement of overlay and alignment systems performanceKLA TENCOR CORP·Filed 2008·Granted Oct 13, 2009·13 cites·11 claims
- 1981US7724375B1Method and apparatus for increasing metrology or inspection tool throughputKLA TENCOR CORP·Filed 2008·Granted May 25, 2010·16 cites·21 claims
- 2080US9645079B2Structured illumination for contrast enhancement in overlay metrologyKLA TENCOR CORP·Filed 2015·Granted May 9, 2017·2 cites·28 claims
- 2180US9442369B1Method and apparatus for lithographic mask productionKLA TENCOR CORP·Filed 2013·Granted Sep 13, 2016·3 cites·9 claims
- 2270US7111256B2Use of overlay diagnostics for enhanced automatic process controlKLA TENCOR TECH CORP·Filed 2003·Granted Sep 19, 2006·9 cites·52 claims
- 2367US10261014B2Near field metrologyKLA TENCOR CORP·Filed 2014·Granted Apr 16, 2019·2 cites·17 claims
- 2461US10274425B2Structured illumination for contrast enhancement in overlay metrologyKLA TENCOR CORP·Filed 2017·Granted Apr 30, 2019·0 cites·26 claims
- 2559US10139528B1Compound objectives for imaging and scatterometry overlayKLA TENCOR CORP·Filed 2017·Granted Nov 27, 2018·0 cites·15 claims
- 2648US4731670AImaging apparatusEASTMAN KODAK CO·Filed 1987·Granted Mar 15, 1988·13 cites·5 claims
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