Inventor · disambiguated record

Andreas Hertgens

Also filed as: HERTGENS ANDREAS

1 granted patent·5 citations·filing 2010–2010

25Inventor score

Technology areasH10P

Files withHERTGENS ANDREAS1

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1 record

0164US9099508B2Method for automatic measurement and for teaching-in of location positions of objects within a substrate processing system by means of sensor carriers and associated sensor carrierHERTGENS ANDREAS·Filed 2010·Granted Aug 4, 2015·5 cites·18 claims

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