Inventor · disambiguated record
Alan Strasbaugh
Also filed as: STRASBAUGH ALAN · STRASBAUGH ALAN E
9 granted patents·532 citations·filing 1974–2006
90Inventor score
Top patents by PatentIndex Score
9 records- 0196US5423716AWafer-handling apparatus having a resilient membrane which holds wafer when a vacuum is appliedFiled 1994·Granted Jun 13, 1995·282 cites·3 claims
- 0294US5449316AWafer carrier for film planarizationFiled 1994·Granted Sep 12, 1995·162 cites·2 claims
- 0378US6696005B2Method for making a polishing pad with built-in optical sensorSTRASBAUGH·Filed 2002·Granted Feb 24, 2004·15 cites·7 claims
- 0478US3986433ALap milling machineHOWARD STRASBAUGH INC R·Filed 1974·Granted Oct 19, 1976·29 cites·14 claims
- 0576US7008309B2Back pressure control system for CMP and wafer polishingSTRASBAUGH·Filed 2003·Granted Mar 7, 2006·15 cites·5 claims
- 0671US6638389B2Method for applying an insert or tape to chucks or wafer carriers used for grinding, polishing, or planarizing wafersSTRASBAUGH·Filed 2002·Granted Oct 28, 2003·13 cites·2 claims
- 0762US7467990B2Back pressure control system for CMP and wafer polishingSTRASBAUGH·Filed 2006·Granted Dec 23, 2008·2 cites·13 claims
- 0862US7059942B2Method of backgrinding wafers while leaving backgrinding tape on a chuckSTRASBAUGH·Filed 2003·Granted Jun 13, 2006·8 cites·3 claims
- 0960US6866564B2Method of backgrinding wafers while leaving backgrinding tape on a chuckSTRASBAUGH·Filed 2002·Granted Mar 15, 2005·6 cites·40 claims
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