Inventor · disambiguated record
Adolph Miller Allen
Also filed as: ALLEN ADOLPH · ALLEN ADOLPH M · ALLEN ADOLPH MILLER
42 granted patents·21 pending applications·970 citations·filing 1997–2024
97Inventor score
Top patents by PatentIndex Score
63 records- 0198US9460959B1Methods for pre-cleaning conductive interconnect structuresAPPLIED MATERIALS INC·Filed 2015·Granted Oct 4, 2016·113 cites·18 claims
- 0297USD797067STarget profile for a physical vapor deposition chamber targetAPPLIED MATERIALS INC·Filed 2015·Granted Sep 12, 2017·355 cites·1 claims
- 0395US11810770B2Methods and apparatus for controlling ion fraction in physical vapor deposition processesAPPLIED MATERIALS INC·Filed 2021·Granted Nov 7, 2023·2 cites·20 claims
- 0495US9127362B2Process kit and target for substrate processing chamberSCHEIBLE KATHLEEN·Filed 2006·Granted Sep 8, 2015·376 cites·25 claims
- 0592US12368024B2Methods and apparatus for processing a substrateAPPLIED MATERIALS INC·Filed 2021·Granted Jul 22, 2025·2 cites·17 claims
- 0692US11289312B2Physical vapor deposition (PVD) chamber with in situ chamber cleaning capabilityAPPLIED MATERIALS INC·Filed 2019·Granted Mar 29, 2022·4 cites·18 claims
- 0791USD825504STarget profile for a physical vapor deposition chamber targetAPPLIED MATERIALS INC·Filed 2017·Granted Aug 14, 2018·34 cites·1 claims
- 0890US11586160B2Reducing substrate surface scratching using machine learningAPPLIED MATERIALS INC·Filed 2021·Granted Feb 21, 2023·2 cites·20 claims
- 0990US11049701B2Biased cover ring for a substrate processing systemAPPLIED MATERIALS INC·Filed 2017·Granted Jun 29, 2021·3 cites·19 claims
- 1089US11473189B2Method for particle removal from wafers through plasma modification in pulsed PVDAPPLIED MATERIALS INC·Filed 2020·Granted Oct 18, 2022·2 cites·12 claims
- 1189US10347475B2Holding assembly for substrate processing chamberAPPLIED MATERIALS INC·Filed 2015·Granted Jul 9, 2019·7 cites·19 claims
- 1289US9909206B2Process kit having tall deposition ring and deposition ring clampAPPLIED MATERIALS INC·Filed 2016·Granted Mar 6, 2018·6 cites·20 claims
- 1387US11037768B2Methods and apparatus for controlling ion fraction in physical vapor deposition processesAPPLIED MATERIALS INC·Filed 2017·Granted Jun 15, 2021·4 cites·8 claims
- 1487US7422664B2Method for plasma ignitionAPPLIED MATERIALS INC·Filed 2006·Granted Sep 9, 2008·9 cites·29 claims
- 1586US10763090B2High pressure RF-DC sputtering and methods to improve film uniformity and step-coverage of this processAPPLIED MATERIALS INC·Filed 2016·Granted Sep 1, 2020·3 cites·19 claims
- 1682US12094699B2Methods and apparatus for controlling ion fraction in physical vapor deposition processesAPPLIED MATERIALS INC·Filed 2023·Granted Sep 17, 2024·0 cites·20 claims
- 1782US11658016B2Shield for a substrate processing chamberAPPLIED MATERIALS INC·Filed 2019·Granted May 23, 2023·2 cites·20 claims
- 1882US10563304B2Methods and apparatus for dynamically treating atomic layer deposition films in physical vapor deposition chambersAPPLIED MATERIALS INC·Filed 2017·Granted Feb 18, 2020·1 cites·19 claims
- 1981US9991101B2Magnetron assembly for physical vapor deposition chamberAPPLIED MATERIALS INC·Filed 2015·Granted Jun 5, 2018·3 cites·20 claims
- 2079US9343664B2Pattern fortification for HDD bit patterned media pattern transferAPPLIED MATERIALS INC·Filed 2015·Granted May 17, 2016·2 cites·20 claims
- 2178US5894381ALow mass sectioned load beam of head gimbal assembly having increased high first torsion frequency modeREAD RITE CORP·Filed 1997·Granted Apr 13, 1999·31 cites·10 claims
- 2277US9499901B2High density TiN RF/DC PVD deposition with stress tuningAPPLIED MATERIALS INC·Filed 2013·Granted Nov 22, 2016·1 cites·10 claims
- 2376US11932934B2Method for particle removal from wafers through plasma modification in pulsed PVDAPPLIED MATERIALS INC·Filed 2022·Granted Mar 19, 2024·0 cites·17 claims
- 2474US10972280B2Blockchain for distributed authentication of hardware operating profileAPPLIED MATERIALS INC·Filed 2018·Granted Apr 6, 2021·3 cites·20 claims
- 2573US11835927B2Reducing substrate surface scratching using machine learningAPPLIED MATERIALS INC·Filed 2022·Granted Dec 5, 2023·0 cites·20 claims
- 2672US10283334B2Methods and apparatus for maintaining low non-uniformity over target lifeAPPLIED MATERIALS INC·Filed 2014·Granted May 7, 2019·0 cites·15 claims
- 2770US10811257B2Techniques for forming low stress etch-resistant mask using implantationVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Oct 20, 2020·1 cites·16 claims
- 2868US2021071294A1Methods and apparatus for controlling ion fraction in physical vapor deposition processesAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 2968US2020357616A1High pressure rf-dc sputtering and methods to improve film uniformity and step-coverage of this processAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 3066US12136544B2Etch uniformity improvement for single turn internal coil PVD chamberAPPLIED MATERIALS INC·Filed 2022·Granted Nov 5, 2024·0 cites·20 claims
- 3166US2025346998A1Gas delivery network modelingAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 3262US7829456B2Method to modulate coverage of barrier and seed layer using titanium nitrideAPPLIED MATERIALS INC·Filed 2008·Granted Nov 9, 2010·1 cites·20 claims
- 3361US8968536B2Sputtering target having increased life and sputtering uniformityALLEN ADOLPH MILLER·Filed 2007·Granted Mar 3, 2015·3 cites·35 claims
- 3460US2025086356A1Substrate manufacturing equipment comprehensive digital twin fleetAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 3559US12112890B2Top magnets for decreased non-uniformity in PVDAPPLIED MATERIALS INC·Filed 2021·Granted Oct 8, 2024·0 cites·19 claims
- 3659US2019259586A1Methods and apparatus for maintaining low non-uniformity over target lifeAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 3758US9611539B2Crystalline orientation and overhang control in collision based RF plasmasAPPLIED MATERIALS INC·Filed 2013·Granted Apr 4, 2017·0 cites·13 claims
- 3856US2020048760A1High power impulse magnetron sputtering physical vapor deposition of tungsten films having improved bottom coverageAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 3955US9660185B2Pattern fortification for HDD bit patterned media pattern transferAPPLIED MATERIALS INC·Filed 2016·Granted May 23, 2017·0 cites·20 claims
- 4055US2025085699A1Substrate manufacturing equipment comprehensive digital twin fleetAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 4154US2013277203A1Process kit shield and physical vapor deposition chamber having sameAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
- 4253US10283345B2Methods for pre-cleaning conductive materials on a substrateAPPLIED MATERIALS INC·Filed 2016·Granted May 7, 2019·0 cites·18 claims
- 4353US2017088942A1Process kit shield and physical vapor deposition chamber having sameAPPLIED MATERIALS INC·Filed 2016·Application pending·0 cites
- 4451US11289329B2Methods and apparatus for filling a feature disposed in a substrateAPPLIED MATERIALS INC·Filed 2020·Granted Mar 29, 2022·0 cites·20 claims
- 4551US2025086357A1Substrate manufacturing equipment comprehensive digital twin fleetAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 4651US2010252417A1High pressure rf-dc sputtering and methods to improve film uniformity and step-coverage of this processAPPLIED MATERIALS INC·Filed 2010·Application pending·0 cites
- 4750US9218961B2Methods of forming a metal containing layer on a substrate with high uniformity and good profile controlGE ZHENBIN·Filed 2012·Granted Dec 22, 2015·0 cites·13 claims
- 4850US2014131308A1Pattern fortification for hdd bit patterned media pattern transferGOUK ROMAN·Filed 2013·Application pending·0 cites
- 4949US10266940B2Auto capacitance tuner current compensation to control one or more film properties through target lifeAPPLIED MATERIALS INC·Filed 2016·Granted Apr 23, 2019·0 cites·20 claims
- 5049US2019088457A1Sync controller for high impulse magnetron sputteringAPPLIED MATERIALS INC·Filed 2018·Application pending·0 cites
Showing the top 50 of 63 patent records by PatentIndex Score.
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