Inventor · disambiguated record
Andy Ray
Also filed as: RAY ANDY · RAY ANDY M
8 granted patents·1 pending application·37 citations·filing 2010–2024
81Inventor score
Top patents by PatentIndex Score
9 records- 0191US8502173B2System and method for ion implantation with improved productivity and uniformityAXCELIS TECH INC·Filed 2012·Granted Aug 6, 2013·17 cites·38 claims
- 0289US11646175B2Method of mixing upstream and downstream current measurements for inference of the beam current at the bend of an optical element for realtime dose controlAXCELIS TECH INC·Filed 2020·Granted May 9, 2023·4 cites·19 claims
- 0388US8278634B2System and method for ion implantation with improved productivity and uniformityVANDERBERG BO H·Filed 2010·Granted Oct 2, 2012·14 cites·33 claims
- 0476US10483086B2Beam profiling speed enhancement for scanned beam implantersAXCELIS TECH INC·Filed 2015·Granted Nov 19, 2019·2 cites·17 claims
- 0562US2025166959A1High bandwidth variable dose ion implantation system and methodAXCELIS TECH INC·Filed 2024·Application pending·0 cites
- 0648US8378313B2Uniformity of a scanned ion beamAXCELIS TECH INC·Filed 2011·Granted Feb 19, 2013·0 cites·21 claims
- 0741US9490185B2Implant-induced damage control in ion implantationAXCELIS TECH INC·Filed 2013·Granted Nov 8, 2016·0 cites·11 claims
- 0840US9711329B2System and method to improve productivity of hybrid scan ion beam implantersAXCELIS TECH INC·Filed 2015·Granted Jul 18, 2017·0 cites·14 claims
- 0933US9147554B2Use of beam scanning to improve uniformity and productivity of a 2D mechanical scan implantation systemRAY ANDY·Filed 2010·Granted Sep 29, 2015·0 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →