Inventor · disambiguated record
Song Keun Yoon
Also filed as: YOON SONG HUN · YOON SONG KEUN
1 granted patent·5 pending applications·16 citations·filing 2000–2013
36Inventor score
Top patents by PatentIndex Score
6 records- 0181US8771417B2Exhaust unit, exhaust method using the exhaust unit, and substrate processing apparatus including the exhaust unitYOON SONG KEUN·Filed 2008·Granted Jul 8, 2014·16 cites·13 claims
- 0248US2010196625A1Showerhead, substrate processing apparatus including the showerhead, and plasma supplying method using the showerheadEUGENE TECHNOLOGY CO LTD·Filed 2008·Application pending·0 cites
- 0343US2010175622A1Substrate processing apparatusEUGENE TECHNOLOGY CO LTD·Filed 2008·Application pending·0 cites
- 0433US2015159272A1Substrate heating device and process chamberINOCT CO LTD·Filed 2013·Application pending·0 cites
- 0533US2015197851A1Process chamber and substrate processing deviceINOCT CO LTD·Filed 2013·Application pending·0 cites
- 0628US2004047798A1Mesoporous carbon material, carbon/metal oxide composite materials, and electrochemical capacitors using themFiled 2000·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →