Inventor · disambiguated record
Franz Dieterich
Also filed as: DIETERICH FRANZ
1 granted patent·1 pending application·1 citations·filing 2011–2011
15Inventor score
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2 records- 0144US9513569B2Optical collector for collecting extreme ultraviolet radiation, method for operating such an optical collector, and EUV source with such a collectorDIETERICH FRANZ·Filed 2011·Granted Dec 6, 2016·1 cites·13 claims
- 0228US2013134318A1Beam line for a source of extreme ultraviolet (euv) radiationABHARI REZA·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →