Inventor · disambiguated record

Naofumi Oda

Also filed as: ODA NAOFUMI

2 granted patents·1 pending application·16 citations·filing 2001–2007

58Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD3

Top patents by PatentIndex Score

3 records

0162US6506257B2Single-substrate-processing apparatus for semiconductor processTOKYO ELECTRON LTD·Filed 2001·Granted Jan 14, 2003·10 cites·19 claims
0253US6719849B2Single-substrate-processing apparatus for semiconductor processTOKYO ELECTRON LTD·Filed 2001·Granted Apr 13, 2004·6 cites·19 claims
0342US2009038548A1Substrate treating apparatus and treating gas emitting mechanismTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites

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