Inventor · disambiguated record
Martin E. Freeborn
Also filed as: FREEBORN MARTIN · FREEBORN MARTIN E
4 granted patents·1 pending application·63 citations·filing 2009–2019
76Inventor score
Top patents by PatentIndex Score
5 records- 0196US9773643B1Apparatus and method for deposition and etch in gap fillLAM RES CORP·Filed 2016·Granted Sep 26, 2017·41 cites·19 claims
- 0295US10373806B2Apparatus and method for deposition and etch in gap fillLAM RES CORP·Filed 2017·Granted Aug 6, 2019·17 cites·18 claims
- 0393US10957514B2Apparatus and method for deposition and etch in gap fillLAM RES CORP·Filed 2019·Granted Mar 23, 2021·4 cites·7 claims
- 0464US9111733B2Plasma ignition performance for low pressure physical vapor deposition (PVD) processesFREEBORN MARTIN·Filed 2009·Granted Aug 18, 2015·1 cites·20 claims
- 0540US2015163860A1Apparatus and method for uniform irradiation using secondary irradiant energy from a single light sourceLAM RES CORP·Filed 2013·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Martin E. Freeborn files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →