Inventor · disambiguated record
Paul Janis Timans
Also filed as: TIMANS PAUL · TIMANS PAUL J · TIMANS PAUL JANIS
45 granted patents·5 pending applications·1,186 citations·filing 1997–2020
99Inventor score
Top patents by PatentIndex Score
50 records- 0198US7642205B2Rapid thermal processing using energy transfer layersMATTSON TECH INC·Filed 2005·Granted Jan 5, 2010·57 cites·8 claims
- 0297US7015422B2System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energyMATTSON TECH INC·Filed 2001·Granted Mar 21, 2006·98 cites·95 claims
- 0396US8296091B2System and process for calibrating pyrometers in thermal processing chambersTIMANS PAUL JANIS·Filed 2011·Granted Oct 23, 2012·17 cites·25 claims
- 0496US7317870B2Pulsed processing semiconductor heating methods using combinations of heating sourcesMATTSON TECH INC·Filed 2005·Granted Jan 8, 2008·46 cites·49 claims
- 0596US6849831B2Pulsed processing semiconductor heating methods using combinations of heating sourcesMATTSON TECH INC·Filed 2002·Granted Feb 1, 2005·135 cites·111 claims
- 0695US8668383B2Methods for determining wafer temperatureTIMANS PAUL JANIS·Filed 2012·Granted Mar 11, 2014·13 cites·18 claims
- 0795US7453051B2System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energyMATTSON TECH INC·Filed 2006·Granted Nov 18, 2008·20 cites·38 claims
- 0895US7358462B2Apparatus and method for reducing stray light in substrate processing chambersMATTSON TECH INC·Filed 2006·Granted Apr 15, 2008·23 cites·54 claims
- 0995US7269343B2Heating configuration for use in thermal processing chambersMATTSON TECH INC·Filed 2005·Granted Sep 11, 2007·37 cites·20 claims
- 1095US6951996B2Pulsed processing semiconductor heating methods using combinations of heating sourcesMATTSON TECH INC·Filed 2003·Granted Oct 4, 2005·84 cites·79 claims
- 1194US7957926B2System and process for calibrating pyrometers in thermal processing chambersMATTSON TECH INC·Filed 2010·Granted Jun 7, 2011·11 cites·22 claims
- 1294US7543981B2Methods for determining wafer temperatureMATTSON TECH INC·Filed 2006·Granted Jun 9, 2009·29 cites·13 claims
- 1393US8138105B2Rapid thermal processing using energy transfer layersTIMANS PAUL J·Filed 2009·Granted Mar 20, 2012·17 cites·13 claims
- 1493US8000587B2Pulsed processing semiconductor heating methods and associated system using combinations of heating sourcesMATTSON TECH INC·Filed 2007·Granted Aug 16, 2011·17 cites·21 claims
- 1593US7745762B2Optimizing the thermal budget during a pulsed heating processMATTSON TECH INC·Filed 2006·Granted Jun 29, 2010·19 cites·56 claims
- 1693US6835914B2Apparatus and method for reducing stray light in substrate processing chambersMATTSON TECH INC·Filed 2002·Granted Dec 28, 2004·52 cites·47 claims
- 1793US6717158B1Heating device for heating semiconductor wafers in thermal processing chambersMATTSON TECH INC·Filed 2000·Granted Apr 6, 2004·74 cites·15 claims
- 1892US11101142B2Pre-heat processes for millisecond anneal systemBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2020·Granted Aug 24, 2021·2 cites·11 claims
- 1992US7949237B2Heating configuration for use in thermal processing chambersMATTSON TECH INC·Filed 2007·Granted May 24, 2011·17 cites·23 claims
- 2092US7847218B2System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energyMATTSON TECH INC·Filed 2007·Granted Dec 7, 2010·13 cites·24 claims
- 2191US8557721B2Rapid thermal processing using energy transfer layersTIMANS PAUL J·Filed 2012·Granted Oct 15, 2013·9 cites·7 claims
- 2291US6970644B2Heating configuration for use in thermal processing chambersMATTSON TECH INC·Filed 2000·Granted Nov 29, 2005·52 cites·29 claims
- 2389US8918303B2System and process for calibrating pyrometers in thermal processing chambersMATTSON TECH INC·Filed 2012·Granted Dec 23, 2014·6 cites·14 claims
- 2489US8152365B2Method and system for determining optical properties of semiconductor wafersTIMANS PAUL JANIS·Filed 2006·Granted Apr 10, 2012·12 cites·19 claims
- 2589US7737385B2Selective reflectivity process chamber with customized wavelength response and methodMATTSON TECH INC·Filed 2006·Granted Jun 15, 2010·13 cites·22 claims
- 2689US7135656B2Apparatus and method for reducing stray light in substrate processing chambersMATTSON TECH INC·Filed 2004·Granted Nov 14, 2006·33 cites·39 claims
- 2789US6222990B1Heating element for heating the edges of wafers in thermal processing chambersSTEAG RTP SYSTEMS·Filed 1997·Granted Apr 24, 2001·116 cites·24 claims
- 2888US8696197B2Method and system for determining optical properties of semiconductor wafersTIMANS PAUL JANIS·Filed 2012·Granted Apr 15, 2014·7 cites·12 claims
- 2988US8222570B2System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energyTIMANS PAUL JANIS·Filed 2008·Granted Jul 17, 2012·8 cites·37 claims
- 3088US7115837B2Selective reflectivity process chamber with customized wavelength response and methodMATTSON TECH INC·Filed 2003·Granted Oct 3, 2006·38 cites·100 claims
- 3187US10262873B2Pre-heat processes for millisecond anneal systemMATTSON TECH INC·Filed 2017·Granted Apr 16, 2019·3 cites·14 claims
- 3287US10190915B2System and process for calibrating pyrometers in thermal processing chambersMATTSON TECH INC·Filed 2014·Granted Jan 29, 2019·4 cites·10 claims
- 3387US7734439B2System and process for calibrating pyrometers in thermal processing chambersMATTSON TECH INC·Filed 2002·Granted Jun 8, 2010·26 cites·12 claims
- 3486US8669496B2System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energyTIMANS PAUL JANIS·Filed 2012·Granted Mar 11, 2014·4 cites·12 claims
- 3586US8236706B2Method and apparatus for growing thin oxide films on silicon while minimizing impact on existing structuresPEUSE BRUCE W·Filed 2008·Granted Aug 7, 2012·14 cites·11 claims
- 3683US8837923B2Pulsed processing semiconductor heating methods using combinations of heating sourcesTIMANS PAUL J·Filed 2011·Granted Sep 16, 2014·4 cites·13 claims
- 3783US7977258B2Method and system for thermally processing a plurality of wafer-shaped objectsMATTSON TECH INC·Filed 2007·Granted Jul 12, 2011·11 cites·69 claims
- 3882US9633876B2Selective reflectivity process chamber with customized wavelength response and methodTIMANS PAUL J·Filed 2010·Granted Apr 25, 2017·5 cites·18 claims
- 3980US8157439B2Methods for determining wafer temperatureTIMANS PAUL JANIS·Filed 2009·Granted Apr 17, 2012·9 cites·26 claims
- 4076US7976216B2Determining the temperature of silicon at high temperaturesMATTSON TECH INC·Filed 2007·Granted Jul 12, 2011·9 cites·27 claims
- 4175US7045746B2Shadow-free shutter arrangement and methodMATTSON TECH INC·Filed 2003·Granted May 16, 2006·21 cites·79 claims
- 4263US10679864B2Pre-heat processes for millisecond anneal systemMATTSON TECH INC·Filed 2019·Granted Jun 9, 2020·0 cites·6 claims
- 4356US2014246422A1Heating Configuration for Use in Thermal Processing ChambersKOREN ZION·Filed 2014·Application pending·0 cites
- 4455US8575521B2Monitoring witness structures for temperature control in RTP systemsNENYEI ZSOLT·Filed 2008·Granted Nov 5, 2013·1 cites·3 claims
- 4552US11195732B2Low thermal budget annealingMATTSON TECH INC·Filed 2019·Granted Dec 7, 2021·0 cites·20 claims
- 4650US2011222840A1Heating Configuration For Use in Thermal Processing ChambersKOREN ZION·Filed 2011·Application pending·0 cites
- 4747US2010252547A1System and method for reducing object deformation during a pulsed heating processMATTSON TECH INC·Filed 2010·Application pending·0 cites
- 4845US2012298039A1Method and apparatus for growing thin oxide films on silicon while minimizing impact on existing structuresPEUSE BRUCE W·Filed 2012·Application pending·0 cites
- 4944US12399064B2Systems and methods for thermal processing and temperature measurement of a workpiece at low temperaturesMATTSON TECH INC·Filed 2019·Granted Aug 26, 2025·0 cites·14 claims
- 5044US2006291833A1Switchable reflector wall conceptMATTSON TECHONOLOGY INC·Filed 2006·Application pending·0 cites
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