Inventor · disambiguated record
Marten Krebs
Also filed as: KREBS MARTEN
1 granted patent·1 pending application·4 citations·filing 2011–2012
24Inventor score
Technology areasG03F
Top patents by PatentIndex Score
2 records- 0179US8988752B2Beam control apparatus for an illumination beam and metrology system comprising an optical system containing such a beam control apparatusZEISS CARL SMT GMBH·Filed 2012·Granted Mar 24, 2015·4 cites·23 claims
- 0229US2012162626A1Shutter device for a lithography apparatus and lithography apparatusKREBS MARTEN·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →