Inventor · disambiguated record
Gerald R. Dietze
Also filed as: DIETZE GERALD R · DIETZE GERALD ROGER
16 granted patents·2 pending applications·1,025 citations·filing 1995–2003
95Inventor score
Files withSEH AMERICA INC16
Top patents by PatentIndex Score
18 records- 0197US6808564B2In-situ post epitaxial treatment processSEH AMERICA INC·Filed 2003·Granted Oct 26, 2004·239 cites·20 claims
- 0294US6375749B1Susceptorless semiconductor wafer support and reactor system for epitaxial layer growthSEH AMERICA INC·Filed 2000·Granted Apr 23, 2002·441 cites·21 claims
- 0394US6338756B2In-situ post epitaxial treatment processSEH AMERICA INC·Filed 2000·Granted Jan 15, 2002·65 cites·19 claims
- 0491US6190453B1Growth of epitaxial semiconductor material with improved crystallographic propertiesSEH AMERICA INC·Filed 1999·Granted Feb 20, 2001·70 cites·10 claims
- 0584US6284986B1Method of determining the thickness of a layer on a silicon substrateSEH AMERICA INC·Filed 1999·Granted Sep 4, 2001·74 cites·7 claims
- 0673US5685906AMethod and apparatus for configuring an epitaxial reactor for reduced set-up time and improved layer qualitySEH AMERICA INC·Filed 1995·Granted Nov 11, 1997·38 cites·13 claims
- 0769US6562128B1In-situ post epitaxial treatment processSEH AMERICA INC·Filed 2002·Granted May 13, 2003·10 cites·11 claims
- 0866US6184154B1Method of processing the backside of a wafer within an epitaxial reactor chamberSEH AMERICA INC·Filed 1999·Granted Feb 6, 2001·30 cites·16 claims
- 0964US6632277B2Optimized silicon wafer gettering for advanced semiconductor devicesSEH AMERICA INC·Filed 2001·Granted Oct 14, 2003·11 cites·12 claims
- 1062US6454852B2High efficiency silicon wafer optimized for advanced semiconductor devicesSEH AMERICA INC·Filed 2001·Granted Sep 24, 2002·9 cites·33 claims
- 1158US6565651B2Optimized silicon wafer strength for advanced semiconductor devicesSEH AMERICA INC·Filed 2001·Granted May 20, 2003·3 cites·23 claims
- 1257US6471771B2In-situ post epitaxial treatment processSEH AMERICA INC·Filed 2001·Granted Oct 29, 2002·4 cites·24 claims
- 1355US6506667B2Growth of epitaxial semiconductor material with improved crystallographic propertiesSEH AMERICA INC·Filed 2000·Granted Jan 14, 2003·2 cites·12 claims
- 1454US6013319AMethod and apparatus for increasing deposition quality of a chemical vapor deposition systemFiled 1998·Granted Jan 11, 2000·17 cites·9 claims
- 1550US6395085B2Purity silicon wafer for use in advanced semiconductor devicesSEH AMERICA INC·Filed 2001·Granted May 28, 2002·3 cites·21 claims
- 1641US2003017716A1In-situ post epitaxial treatment processFiled 2002·Application pending·0 cites
- 1736US5964948AExhaust insert for barrel-type epitaxial reactorsSEH AMERICA INC·Filed 1998·Granted Oct 12, 1999·9 cites·18 claims
- 1833US2002062792A1Wafer support device and reactor system for epitaxial layer growthSEH AMERICA INC·Filed 2002·Application pending·0 cites
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