Assignee
SEH AMERICA INC
US·158 granted patents·14 pending applications·3,223 citations·filing 1995–2005
Top patents by PatentIndex Score
172 records- 0197US6808564B2In-situ post epitaxial treatment processSEH AMERICA INC·Filed 2003·Granted Oct 26, 2004·239 cites·20 claims
- 0294US6375749B1Susceptorless semiconductor wafer support and reactor system for epitaxial layer growthSEH AMERICA INC·Filed 2000·Granted Apr 23, 2002·441 cites·21 claims
- 0394US6338756B2In-situ post epitaxial treatment processSEH AMERICA INC·Filed 2000·Granted Jan 15, 2002·65 cites·19 claims
- 0491US6190453B1Growth of epitaxial semiconductor material with improved crystallographic propertiesSEH AMERICA INC·Filed 1999·Granted Feb 20, 2001·70 cites·10 claims
- 0591US5611855AMethod for manufacturing a calibration wafer having a microdefect-free layer of a precisely predetermined depthSEH AMERICA INC·Filed 1995·Granted Mar 18, 1997·131 cites·12 claims
- 0688US6475385B1Resin trap device for use in ultrapure water systems and method of purifying water using sameSEH AMERICA INC·Filed 2000·Granted Nov 5, 2002·47 cites·8 claims
- 0788US6022793ASilicon and oxygen ion co-implantation for metallic gettering in epitaxial wafersSEH AMERICA INC·Filed 1997·Granted Feb 8, 2000·84 cites·9 claims
- 0887US6703290B2Growth of epitaxial semiconductor material with improved crystallographic propertiesSEH AMERICA INC·Filed 2002·Granted Mar 9, 2004·29 cites·20 claims
- 0986US6482749B1Method for etching a wafer edge using a potassium-based chemical oxidizer in the presence of hydrofluoric acidSEH AMERICA INC·Filed 2000·Granted Nov 19, 2002·91 cites·19 claims
- 1086US6354794B2Method for automatically transferring wafers between wafer holders in a liquid environmentSEH AMERICA INC·Filed 2001·Granted Mar 12, 2002·46 cites·19 claims
- 1184US6284986B1Method of determining the thickness of a layer on a silicon substrateSEH AMERICA INC·Filed 1999·Granted Sep 4, 2001·74 cites·7 claims
- 1282US5651894AWater purification system and methodSEH AMERICA INC·Filed 1995·Granted Jul 29, 1997·67 cites·5 claims
- 1381US5827118AClean storage unit air flow systemSEH AMERICA INC·Filed 1996·Granted Oct 27, 1998·85 cites·15 claims
- 1481US5629216AMethod for producing semiconductor wafers with low light scattering anomaliesSEH AMERICA INC·Filed 1996·Granted May 13, 1997·54 cites·12 claims
- 1579US6189176B1High pressure gas cleaning purge of a dry process vacuum pumpSEH AMERICA INC·Filed 2000·Granted Feb 20, 2001·17 cites·8 claims
- 1679US5730770ATwo-stage air filter for use with electronic enclosuresSEH AMERICA INC·Filed 1997·Granted Mar 24, 1998·58 cites·6 claims
- 1777US6825487B2Method for isolation of wafer support-related crystal defectsSEH AMERICA INC·Filed 2002·Granted Nov 30, 2004·25 cites·17 claims
- 1877US5961716ADiameter and melt measurement method used in automatically controlled crystal growthSEH AMERICA INC·Filed 1997·Granted Oct 5, 1999·36 cites·18 claims
- 1976US6620632B2Method for evaluating impurity concentrations in semiconductor substratesSEH AMERICA INC·Filed 2000·Granted Sep 16, 2003·18 cites·17 claims
- 2076US6059875AMethod of effecting nitrogen doping in Czochralski grown silicon crystalSEH AMERICA INC·Filed 1999·Granted May 9, 2000·32 cites·17 claims
- 2173US6673147B2High resistivity silicon wafer having electrically inactive dopant and method of producing sameSEH AMERICA INC·Filed 2001·Granted Jan 6, 2004·16 cites·33 claims
- 2273US6606582B1Universal system, method and computer program product for collecting and processing process data including particle measurement dataSEH AMERICA INC·Filed 2000·Granted Aug 12, 2003·22 cites·29 claims
- 2373US6503363B2System for reducing wafer contamination using freshly, conditioned alkaline etching solutionSEH AMERICA INC·Filed 2000·Granted Jan 7, 2003·16 cites·50 claims
- 2473US6352071B1Apparatus and method for reducing bow and warp in silicon wafers sliced by a wire sawSEH AMERICA INC·Filed 2000·Granted Mar 5, 2002·23 cites·16 claims
- 2573US5865887AMethod for improving mechanical strength of the neck section of czochralski silicon crystalSEH AMERICA INC·Filed 1997·Granted Feb 2, 1999·23 cites·12 claims
- 2673US5685906AMethod and apparatus for configuring an epitaxial reactor for reduced set-up time and improved layer qualitySEH AMERICA INC·Filed 1995·Granted Nov 11, 1997·38 cites·13 claims
- 2772US6439856B1Inline stroke counter for air pumpsSEH AMERICA INC·Filed 2000·Granted Aug 27, 2002·16 cites·7 claims
- 2872US6254674B1Method of controllably delivering dopant by limiting the release rate of dopant from a submerged vesselSEH AMERICA INC·Filed 2000·Granted Jul 3, 2001·13 cites·7 claims
- 2972US6179914B1Dopant delivery system and methodSEH AMERICA INC·Filed 1999·Granted Jan 30, 2001·22 cites·10 claims
- 3071US6669777B2Method of producing a high resistivity silicon wafer utilizing heat treatment that occurs during device fabricationSEH AMERICA INC·Filed 2001·Granted Dec 30, 2003·9 cites·19 claims
- 3171US5993555AApparatus and process for growing silicon epitaxial layerSEH AMERICA INC·Filed 1997·Granted Nov 30, 1999·43 cites·8 claims
- 3271US5641354APuller cellSEH AMERICA INC·Filed 1995·Granted Jun 24, 1997·31 cites·13 claims
- 3370US6565652B1High resistivity silicon wafer and method of producing same using the magnetic field Czochralski methodSEH AMERICA INC·Filed 2001·Granted May 20, 2003·8 cites·11 claims
- 3470US6457929B2Apparatus and method for automatically transferring wafers between wafer holders in a liquid environmentSEH AMERICA INC·Filed 1998·Granted Oct 1, 2002·40 cites·25 claims
- 3570US6123617AClean room air filtering systemSEH AMERICA INC·Filed 1998·Granted Sep 26, 2000·41 cites·17 claims
- 3670US6030451ATwo camera diameter control system with diameter tracking for silicon ingot growthSEH AMERICA INC·Filed 1998·Granted Feb 29, 2000·23 cites·11 claims
- 3769US7112509B2Method of producing a high resistivity SIMOX silicon substrateSEH AMERICA INC·Filed 2003·Granted Sep 26, 2006·16 cites·19 claims
- 3869US6562128B1In-situ post epitaxial treatment processSEH AMERICA INC·Filed 2002·Granted May 13, 2003·10 cites·11 claims
- 3968US6547646B2Method for supplying slurry to a semiconductor processing machineSEH AMERICA INC·Filed 2001·Granted Apr 15, 2003·12 cites·22 claims
- 4068US6398382B1Apparatus and method for indicating liquid level in a chemical tankSEH AMERICA INC·Filed 2000·Granted Jun 4, 2002·15 cites·10 claims
- 4168US6286685B1System and method for wafer thickness sortingSEH AMERICA INC·Filed 1999·Granted Sep 11, 2001·35 cites·9 claims
- 4266US6184154B1Method of processing the backside of a wafer within an epitaxial reactor chamberSEH AMERICA INC·Filed 1999·Granted Feb 6, 2001·30 cites·16 claims
- 4365US7137405B2Low pressure check valveSEH AMERICA INC·Filed 2004·Granted Nov 21, 2006·16 cites·21 claims
- 4465US6733368B1Method for lapping a waferSEH AMERICA INC·Filed 2003·Granted May 11, 2004·13 cites·21 claims
- 4565US6611325B1Enhanced defect detection using surface scanning inspection toolsSEH AMERICA INC·Filed 2000·Granted Aug 26, 2003·5 cites·27 claims
- 4664US6632277B2Optimized silicon wafer gettering for advanced semiconductor devicesSEH AMERICA INC·Filed 2001·Granted Oct 14, 2003·11 cites·12 claims
- 4764US6409463B1Apparatuses and methods for adjusting a substrate centering systemSEH AMERICA INC·Filed 2000·Granted Jun 25, 2002·16 cites·16 claims
- 4864US6402957B1Bromine biocide removalSEH AMERICA INC·Filed 1999·Granted Jun 11, 2002·24 cites·2 claims
- 4964US6228165B1Method of manufacturing crystal of silicon using an electric potentialSEH AMERICA INC·Filed 1999·Granted May 8, 2001·18 cites·19 claims
- 5064US5961713AMethod for manufacturing a wafer having a microdefect-free layer of a precisely predetermined depthSEH AMERICA INC·Filed 1997·Granted Oct 5, 1999·27 cites·12 claims
Showing the top 50 of 172 patent records by PatentIndex Score.
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