Inventor · disambiguated record
Maurice Willem Jozef Etiënne Wijckmans
Also filed as: WIJCKMANS MAURICE · WIJCKMANS MAURICE WILLEM JOZEF ETIENNE · WIJCKMANS MAURICE WILLEM JOZEF ETIËNN · WIJCKMANS MAURICE WILLEM JOZEF ETIËNNE
19 granted patents·3 pending applications·36 citations·filing 2004–2023
91Inventor score
Files withASML NETHERLANDS BV14LOOPSTRA ERIK ROELOF3BUTLER HANS2GROENEVELD ROGIER HERMAN MATHIJS1WIJCKMANS MAURICE1
Top patents by PatentIndex Score
22 records- 0187US10209634B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Feb 19, 2019·3 cites·20 claims
- 0286US11029612B2Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, and method to control a gravity compensator having a negative stiffnessASML NETHERLANDS BV·Filed 2018·Granted Jun 8, 2021·5 cites·18 claims
- 0385US8300208B2Lithographic apparatus and a method to compensate for the effect of disturbances on the projection system of a lithographic apparatusLOOPSTRA ERIK ROELOF·Filed 2009·Granted Oct 30, 2012·8 cites·15 claims
- 0481US8144310B2Positioning system, lithographic apparatus and device manufacturing methodBUTLER HANS·Filed 2009·Granted Mar 27, 2012·5 cites·17 claims
- 0577US10578983B2Lithographic apparatus having an active base frame supportASML NETHERLANDS BV·Filed 2016·Granted Mar 3, 2020·2 cites·20 claims
- 0675US9500953B2Radiation sourceASML NETHERLANDS BV·Filed 2012·Granted Nov 22, 2016·4 cites·29 claims
- 0769US9164401B2Projection system and lithographic apparatusLOOPSTRA ERIK ROELOF·Filed 2009·Granted Oct 20, 2015·2 cites·23 claims
- 0869US9122173B2Positioning system, lithographic apparatus and device manufacturing methodBUTLER HANS·Filed 2012·Granted Sep 1, 2015·1 cites·16 claims
- 0965US8908144B2Lithographic apparatus and device manufacturing methodGROENEVELD ROGIER HERMAN MATHIJS·Filed 2006·Granted Dec 9, 2014·3 cites·11 claims
- 1062US8913228B2Lithographic apparatus and device manufacturing methodWIJCKMANS MAURICE·Filed 2007·Granted Dec 16, 2014·2 cites·39 claims
- 1160US2025306472A1Method for determining a failure event on a lithography system and associated failure detection moduleASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 1257US8289498B2Lithographic apparatus and device manufacturing methodLOOPSTRA ERIK ROELOF·Filed 2009·Granted Oct 16, 2012·1 cites·8 claims
- 1350US10866529B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Dec 15, 2020·0 cites·16 claims
- 1446US11269262B2Frame assembly, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Mar 8, 2022·0 cites·20 claims
- 1546US11169450B2Pneumatic support device and lithographic apparatus with pneumatic support deviceASML NETHERLANDS BV·Filed 2019·Granted Nov 9, 2021·0 cites·20 claims
- 1646US10962890B2Positioning device, lithographic apparatus, method for compensating a balance mass torque and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Mar 30, 2021·0 cites·15 claims
- 1746US10955761B2Lithographic apparatus, lithographic projection apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Mar 23, 2021·0 cites·17 claims
- 1844US10838312B2Lithographic apparatus, lithographic projection apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Nov 17, 2020·0 cites·17 claims
- 1944US10816910B2Vibration isolator, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Oct 27, 2020·0 cites·27 claims
- 2041US10503086B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Dec 10, 2019·0 cites·15 claims
- 2138US2020209757A1Lithographic Apparatus, Lithographic Projection Apparatus and Device Manufacturing MethodASML NETHERLANDS BV·Filed 2017·Application pending·0 cites
- 2235US2008193201A1Optical Assembly Structure Comprising a Connecting Body with Thermal Expansion Compensations MeansZEISS CARL SMT AG·Filed 2004·Application pending·0 cites
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