Inventor · disambiguated record

Theodorus Mattheus Joannus Maria Huizinga

Also filed as: HUIZINGA THEODORUS MATTHEUS JOANNUS MARIA

1 granted patent·5 citations·filing 2018–2018

25Inventor score

Technology areasG03F

Files withASML NETHERLANDS BV1

Top patents by PatentIndex Score

1 record

0186US11029612B2Bearing device, magnetic gravity compensator, vibration isolation system, lithographic apparatus, and method to control a gravity compensator having a negative stiffnessASML NETHERLANDS BV·Filed 2018·Granted Jun 8, 2021·5 cites·18 claims

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