Inventor · disambiguated record

Chen-Fon Chang

Also filed as: CHANG CHEN-FON

2 granted patents·1 pending application·0 citations·filing 2021–2025

25Inventor score

Technology areasH10P

Files withTAIWAN SEMICONDUCTOR MFG CO LTD3

Top patents by PatentIndex Score

3 records

0162US2025201528A1Method and apparatus for revitalizing plasma processing toolsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
0261US12261026B2Method and apparatus for revitalizing plasma processing toolsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Mar 25, 2025·0 cites·20 claims
0348US11908754B2Method and system for controlling profile of critical dimensionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Feb 20, 2024·0 cites·20 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →