Inventor · disambiguated record
Myung-Soo Hwang
Also filed as: HWANG MYUNG-SOO
5 granted patents·2 citations·filing 2015–2022
63Inventor score
Files withSAMSUNG ELECTRONICS CO LTD5
Top patents by PatentIndex Score
5 records- 0180US9874809B2Pellicle for a reflective mask and reflective mask assembly including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Jan 23, 2018·2 cites·20 claims
- 0267US12189295B2Spin coater and semiconductor fabrication method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Jan 7, 2025·0 cites·5 claims
- 0355US11537047B2Spin coater and semiconductor fabrication method for reducing regeneration of photoresistSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Dec 27, 2022·0 cites·11 claims
- 0449US9996009B2Extreme ultraviolet (EUV) exposure system and method of manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted Jun 12, 2018·0 cites·17 claims
- 0542US9575421B2Apparatus for protecting extreme ultra violet mask and extreme ultra violet exposure apparatus including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Feb 21, 2017·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →