Inventor · disambiguated record
Herng Yau Yoong
Also filed as: YOONG HERNG YAU
5 granted patents·1 pending application·0 citations·filing 2020–2021
58Inventor score
Files withAPPLIED MATERIALS INC6
Top patents by PatentIndex Score
6 records- 0164US11782337B2Multilayer extreme ultraviolet reflectorsAPPLIED MATERIALS INC·Filed 2021·Granted Oct 10, 2023·0 cites·20 claims
- 0262US11480866B2Method and apparatus to anneal EUV mask blankAPPLIED MATERIALS INC·Filed 2020·Granted Oct 25, 2022·0 cites·20 claims
- 0358US11762278B2Multilayer extreme ultraviolet reflectorsAPPLIED MATERIALS INC·Filed 2021·Granted Sep 19, 2023·0 cites·20 claims
- 0454US11467499B2System and method of measuring refractive index of EUV mask absorberAPPLIED MATERIALS INC·Filed 2020·Granted Oct 11, 2022·0 cites·18 claims
- 0554US11366059B2System and method to measure refractive index at specific wavelengthsAPPLIED MATERIALS INC·Filed 2020·Granted Jun 21, 2022·0 cites·20 claims
- 0647US2021124253A1Extreme ultraviolet mask blank defect reduction methodsAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →