Inventor · disambiguated record
Hanshen Zhang
Also filed as: ZHANG HANSHEN
13 granted patents·1 pending application·542 citations·filing 2010–2018
91Inventor score
Top patents by PatentIndex Score
14 records- 0198US9881805B2Silicon selective removalAPPLIED MATERIALS INC·Filed 2016·Granted Jan 30, 2018·110 cites·16 claims
- 0298US9564338B1Silicon-selective removalAPPLIED MATERIALS INC·Filed 2015·Granted Feb 7, 2017·124 cites·20 claims
- 0398US9472412B2Procedure for etch rate consistencyAPPLIED MATERIALS INC·Filed 2015·Granted Oct 18, 2016·132 cites·10 claims
- 0498US9245762B2Procedure for etch rate consistencyAPPLIED MATERIALS INC·Filed 2014·Granted Jan 26, 2016·165 cites·7 claims
- 0582US11637002B2Methods and systems to enhance process uniformityAPPLIED MATERIALS INC·Filed 2014·Granted Apr 25, 2023·4 cites·20 claims
- 0680US11121002B2Systems and methods for etching metals and metal derivativesAPPLIED MATERIALS INC·Filed 2018·Granted Sep 14, 2021·3 cites·18 claims
- 0777US10854426B2Metal recess for semiconductor structuresAPPLIED MATERIALS INC·Filed 2018·Granted Dec 1, 2020·2 cites·19 claims
- 0871US11328909B2Chamber conditioning and removal processesAPPLIED MATERIALS INC·Filed 2017·Granted May 10, 2022·1 cites·17 claims
- 0970US10861676B2Metal recess for semiconductor structuresAPPLIED MATERIALS INC·Filed 2018·Granted Dec 8, 2020·1 cites·19 claims
- 1054US11239061B2Methods and systems to enhance process uniformityAPPLIED MATERIALS INC·Filed 2017·Granted Feb 1, 2022·0 cites·20 claims
- 1146US11682560B2Systems and methods for hafnium-containing film removalAPPLIED MATERIALS INC·Filed 2018·Granted Jun 20, 2023·0 cites·17 claims
- 1243US10692880B23D NAND high aspect ratio structure etchAPPLIED MATERIALS INC·Filed 2017·Granted Jun 23, 2020·0 cites·13 claims
- 1342US2010190036A1Systems and Methods for Surface Modification by Filtered Cathodic Vacuum ArcKOMVOPOULOS KYRIAKOS·Filed 2010·Application pending·0 cites
- 1439US9960049B2Two-step fluorine radical etch of hafnium oxideAPPLIED MATERIALS INC·Filed 2016·Granted May 1, 2018·0 cites·16 claims
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