Inventor · disambiguated record
Ted Minshall
Also filed as: MINSHALL TED
7 granted patents·51 citations·filing 2014–2020
82Inventor score
Files withLAM RES CORP7
Top patents by PatentIndex Score
7 records- 0196US10665429B2Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformityLAM RES CORP·Filed 2017·Granted May 26, 2020·6 cites·20 claims
- 0296US9793096B2Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformityLAM RES CORP·Filed 2015·Granted Oct 17, 2017·16 cites·18 claims
- 0396US9698042B1Wafer centering in pocket to improve azimuthal thickness uniformity at wafer edgeLAM RES CORP·Filed 2016·Granted Jul 4, 2017·23 cites·19 claims
- 0479US9920844B2Valve manifold deadleg elimination via reentrant flow pathLAM RES CORP·Filed 2015·Granted Mar 20, 2018·3 cites·34 claims
- 0576US9460915B2Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edgesLAM RES CORP·Filed 2014·Granted Oct 4, 2016·3 cites·8 claims
- 0669US11127567B2Systems and methods for suppressing parasitic plasma and reducing within-wafer non-uniformityLAM RES CORP·Filed 2020·Granted Sep 21, 2021·0 cites·24 claims
- 0750US9852901B2Systems and methods for reducing backside deposition and mitigating thickness changes at substrate edgesLAM RES CORP·Filed 2016·Granted Dec 26, 2017·0 cites·7 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →