Inventor · disambiguated record
Juan Chacin
Also filed as: CHACIN JUAN · CHACIN JUAN M
8 granted patents·4 pending applications·114 citations·filing 2001–2020
87Inventor score
Top patents by PatentIndex Score
12 records- 0191US7691204B2Film formation apparatus and methods including temperature and emissivity/pattern compensationAPPLIED MATERIALS INC·Filed 2005·Granted Apr 6, 2010·13 cites·20 claims
- 0288US8372203B2Apparatus temperature control and pattern compensationAPPLIED MATERIALS INC·Filed 2005·Granted Feb 12, 2013·9 cites·27 claims
- 0384US8852349B2Wafer processing hardware for epitaxial deposition with reduced auto-doping and backside defectsCHACIN JUAN·Filed 2006·Granted Oct 7, 2014·12 cites·40 claims
- 0481US6916744B2Method and apparatus for planarization of a material by growing a sacrificial film with customized thickness profileAPPLIED MATERIALS INC·Filed 2002·Granted Jul 12, 2005·27 cites·19 claims
- 0580US6344631B1Substrate support assembly and processing apparatusAPPLIED MATERIALS INC·Filed 2001·Granted Feb 5, 2002·27 cites·30 claims
- 0679US7704327B2High temperature anneal with improved substrate supportAPPLIED MATERIALS INC·Filed 2002·Granted Apr 27, 2010·18 cites·1 claims
- 0775US8735772B2Method and apparatus for improved laser scribing of opto-electric devicesCHACIN JUAN·Filed 2011·Granted May 27, 2014·4 cites·22 claims
- 0867US7700376B2Edge temperature compensation in thermal processing particularly useful for SOI wafersAPPLIED MATERIALS INC·Filed 2006·Granted Apr 20, 2010·4 cites·19 claims
- 0945US2021398824A1Batch wafer degas chamber and integration into factory interface and vacuum-based mainframeAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 1043US2008072820A1Modular cvd epi 300mm reactorAPPLIED MATERIALS INC·Filed 2007·Application pending·0 cites
- 1134US2012175652A1Method and apparatus for improved singulation of light emitting devicesCHYR IRVING·Filed 2011·Application pending·0 cites
- 1229US2013234149A1Sidewall texturing of light emitting diode structuresHALDERMAN JONATHAN D·Filed 2012·Application pending·0 cites
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