Inventor · disambiguated record
Hirohisa Hirayanagi
Also filed as: HIRAYANAGI HIROHISA
1 granted patent·3 pending applications·2 citations·filing 2008–2014
18Inventor score
Top patents by PatentIndex Score
4 records- 0156US8536539B2Ion beam generator, and substrate processing apparatus and production method of electronic device using the ion beam generatorHIRAYANAGI HIROHISA·Filed 2010·Granted Sep 17, 2013·2 cites·7 claims
- 0242US2009078569A1Inductively coupled plasma processing apparatusCANON ANELVA CORP·Filed 2008·Application pending·0 cites
- 0338US2014230728A1Vacuum processing apparatusCANON ANELVA CORP·Filed 2014·Application pending·0 cites
- 0426US2012104274A1Ion beam generating apparatus, substrate processing apparatus and method of manufacturing electronic deviceHIRAYANAGI HIROHISA·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →