Inventor · disambiguated record

Egbert Dirk Stam

Also filed as: STAM EGBERT DIRK

1 granted patent·5 citations·filing 2006–2006

28Inventor score

Technology areasH10P

Files withASML NETHERLANDS BV1

Top patents by PatentIndex Score

1 record

0172US7791708B2Lithographic apparatus, substrate table, and method for enhancing substrate release propertiesASML NETHERLANDS BV·Filed 2006·Granted Sep 7, 2010·5 cites·25 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →