Inventor · disambiguated record
Shyuji Tobashi
Also filed as: TOBASHI SHYUJI
2 granted patents·3 pending applications·6 citations·filing 2000–2002
44Inventor score
Top patents by PatentIndex Score
5 records- 0161US6461428B2Method and apparatus for controlling rise and fall of temperature in semiconductor substratesTOSHIBA CERAMICS CO·Filed 2000·Granted Oct 8, 2002·6 cites·14 claims
- 0239US6485573B2Apparatus for reduced-pressure epitaxial growth and method of controlling the apparatusTOSHIBA CERAMICS CO·Filed 2001·Granted Nov 26, 2002·0 cites·4 claims
- 0338US2002009868A1Method of growing a thin film in gaseous phase and apparatus for growing a thin film in gaseous phase for use in said methodTOSHIBA CERAMICS CO·Filed 2001·Application pending·0 cites
- 0435US2003045128A1Wafer transfer method performed with vapor thin film growth system and wafer support member used for this methodTOSHIBA MACHINE CO LTD·Filed 2002·Application pending·0 cites
- 0533US2002182892A1Wafer transfer method performed with vapor thin film growth system and wafer support member used for this methodFiled 2000·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →