Inventor · disambiguated record
Yelena Pavlova
Also filed as: PAVLOVA YELENA · PAVLOVA YELENA V · PAVLOVA YELENA VASILJEVNA
1 granted patent·5 pending applications·2 citations·filing 2009–2012
18Inventor score
Top patents by PatentIndex Score
6 records- 0137US7910390B2Resonant MEMS device that detects photons, particles and small forcesSCANNANOTEK OY·Filed 2009·Granted Mar 22, 2011·2 cites·15 claims
- 0231US2013220783A1MEMS Switch Having One or More Vacuum GapsURVAS ILKKA·Filed 2012·Application pending·0 cites
- 0331US2013140155A1MEMS Switch Having Cantilevered ActuationURVAS ILKKA·Filed 2012·Application pending·0 cites
- 0421US2013152694A1Sensor with vacuum cavity and method of fabricationURVAS ILKKA·Filed 2012·Application pending·0 cites
- 0519US2011277808A1Mems solar cell device and arrayPAVLOV ANDREI J·Filed 2011·Application pending·0 cites
- 0617US2011133597A1Electromechanical systems, waveguides and methods of productionSCANNANOTEK OY·Filed 2010·Application pending·0 cites
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