Assignee

SCANNANOTEK OY

FI·1 granted patent·1 pending application·2 citations·filing 2009–2010

Technology mixB81C1 G01J1 G01Q1 H01H1 H03B1 H03H1

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2 records

0137US7910390B2Resonant MEMS device that detects photons, particles and small forcesSCANNANOTEK OY·Filed 2009·Granted Mar 22, 2011·2 cites·15 claims
0217US2011133597A1Electromechanical systems, waveguides and methods of productionSCANNANOTEK OY·Filed 2010·Application pending·0 cites

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