Inventor · disambiguated record
Armin Rauthe-Schoech
Also filed as: RAUTHE SCHOECH ARMIN
2 granted patents·1 pending application·2 citations·filing 2010–2017
43Inventor score
Technology areasG03F
Top patents by PatentIndex Score
3 records- 0169US9235142B2Projection exposure system for microlithography and method of monitoring a lateral imaging stabilityMANGER MATTHIAS·Filed 2010·Granted Jan 12, 2016·2 cites·22 claims
- 0254US9720328B2Projection exposure system for microlithography and method of monitoring a lateral imaging stabilityZEISS CARL SMT GMBH·Filed 2016·Granted Aug 1, 2017·0 cites·11 claims
- 0353US2018039184A1Projection exposure system for microlithography and method of monitoring a lateral imaging stabilityZEISS CARL SMT GMBH·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →