Inventor · disambiguated record
Tony R. Kroeker
Also filed as: KROEKER TONY · KROEKER TONY R · KROEKER TONY RAY
19 granted patents·1 pending application·671 citations·filing 1991–2010
96Inventor score
Top patents by PatentIndex Score
20 records- 0193US6390448B1Single shaft dual cradle vacuum slot valveLAM RES CORP·Filed 2000·Granted May 21, 2002·61 cites·6 claims
- 0291US5789878ADual plane robotAPPLIED MATERIALS INC·Filed 1996·Granted Aug 4, 1998·77 cites·45 claims
- 0389US6494670B2Three chamber load lock apparatusAPPLIED MATERIALS INC·Filed 2001·Granted Dec 17, 2002·39 cites·12 claims
- 0484US6095741ADual sided slot valve and method for implementing the sameLAM RES CORP·Filed 1999·Granted Aug 1, 2000·77 cites·18 claims
- 0583US5961269AThree chamber load lock apparatusAPPLIED MATERIALS INC·Filed 1996·Granted Oct 5, 1999·54 cites·17 claims
- 0683US5955858AMechanically clamping robot wristAPPLIED MATERIALS INC·Filed 1997·Granted Sep 21, 1999·52 cites·23 claims
- 0782US6222337B1Mechanically clamping robot wristAPPLIED MATERIALS INC·Filed 1999·Granted Apr 24, 2001·47 cites·13 claims
- 0880US6000227AWafer cooling in a transfer chamber of a vacuum processing systemAPPLIED MATERIALS INC·Filed 1997·Granted Dec 14, 1999·57 cites·19 claims
- 0977US6564818B2Methods of implementing a single shaft, dual cradle vacuum slot valveLAM RES CORP·Filed 2002·Granted May 20, 2003·17 cites·3 claims
- 1076US6719516B2Single wafer load lock with internal wafer transportAPPLIED MATERIALS INC·Filed 1998·Granted Apr 13, 2004·41 cites·18 claims
- 1174US6601824B2Single shaft, dual cradle vacuum slot valveLAM RES CORP·Filed 2002·Granted Aug 5, 2003·13 cites·10 claims
- 1273US6250869B1Three chamber load lock apparatusAPPLIED MATERIALS INC·Filed 1999·Granted Jun 26, 2001·33 cites·11 claims
- 1372US7682462B2Cluster tool process chamber having integrated high pressure and vacuum chambersLAM RES CORP·Filed 2008·Granted Mar 23, 2010·3 cites·12 claims
- 1467US9004086B2Methods and apparatus for displacing fluids from substrates using supercritical CO2NIXON RONDA K·Filed 2010·Granted Apr 14, 2015·4 cites·15 claims
- 1567US6244811B1Atmospheric wafer transfer module with nest for wafer transport robotLAM RES CORP·Filed 1999·Granted Jun 12, 2001·36 cites·15 claims
- 1662US6057662ASingle motor control for substrate handler in processing systemAPPLIED MATERIALS INC·Filed 1998·Granted May 2, 2000·33 cites·22 claims
- 1755US7445015B2Cluster tool process chamber having integrated high pressure and vacuum chambersLAM RES CORP·Filed 2004·Granted Nov 4, 2008·4 cites·19 claims
- 1849US6056504AAdjustable frog-leg robotAPPLIED MATERIALS INC·Filed 1998·Granted May 2, 2000·14 cites·23 claims
- 1940US2001041122A1Single wafer load lock with internal wafer transportAPPLIED MATERIALS INC·Filed 2001·Application pending·0 cites
- 2037US5235740APress with pin detection for interference connectorsIBM·Filed 1991·Granted Aug 17, 1993·9 cites·22 claims
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