Inventor · disambiguated record
Sok Tan
Also filed as: TAN SOK K · TAN SOK-KIOW
1 granted patent·2 pending applications·10 citations·filing 2003–2006
32Inventor score
Top patents by PatentIndex Score
3 records- 0177US7413992B2Tungsten silicide etch process with reduced etch rate micro-loadingLAM RES CORP·Filed 2006·Granted Aug 19, 2008·10 cites·16 claims
- 0235US2005161061A1Methods for cleaning a set of structures comprising yttrium oxide in a plasma processing systemFiled 2003·Application pending·0 cites
- 0328US2005269293A1Seasoning method for etch chamberFAN CHEN-LUNG·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →