Inventor · disambiguated record
Eugene Shifrin
Also filed as: SHIFRIN EUGENE
29 granted patents·2 pending applications·183 citations·filing 2007–2023
95Inventor score
Top patents by PatentIndex Score
31 records- 0196US8041103B2Methods and systems for determining a position of inspection data in design data spaceKLA TENCOR TECH CORP·Filed 2007·Granted Oct 18, 2011·85 cites·18 claims
- 0294US10217625B2Continuous-wave laser-sustained plasma illumination sourceKLA TENCOR CORP·Filed 2016·Granted Feb 26, 2019·12 cites·45 claims
- 0391US9927094B2Plasma cell for providing VUV filtering in a laser-sustained plasma light sourceKLA TENCOR CORP·Filed 2013·Granted Mar 27, 2018·11 cites·23 claims
- 0490US9171364B2Wafer inspection using free-form care areasKLA TENCOR CORP·Filed 2014·Granted Oct 27, 2015·16 cites·33 claims
- 0588US9262821B2Inspection recipe setup from reference image variationKLA TENCOR CORP·Filed 2015·Granted Feb 16, 2016·8 cites·38 claims
- 0687US10395358B2High sensitivity repeater defect detectionKLA TENCOR CORP·Filed 2017·Granted Aug 27, 2019·7 cites·35 claims
- 0786US11778720B2High efficiency laser-sustained plasma light source with collection of broadband radiationKLA CORP·Filed 2020·Granted Oct 3, 2023·1 cites·25 claims
- 0886US9766186B2Array mode repeater detectionKLA TENCOR CORP·Filed 2015·Granted Sep 19, 2017·3 cites·34 claims
- 0985US9355208B2Detecting defects on a waferKLA TENCOR CORP·Filed 2014·Granted May 31, 2016·8 cites·37 claims
- 1082US10381216B2Continuous-wave laser-sustained plasma illumination sourceKLA TENCOR CORP·Filed 2018·Granted Aug 13, 2019·2 cites·17 claims
- 1181US10887974B2High efficiency laser-sustained plasma light sourceKLA TENCOR CORP·Filed 2016·Granted Jan 5, 2021·2 cites·31 claims
- 1281US9734422B2System and method for enhanced defect detection with a digital matched filterKLA TENCOR CORP·Filed 2015·Granted Aug 15, 2017·5 cites·25 claims
- 1381US8698399B2Multi-wavelength pumping to sustain hot plasmaBEZEL ILYA V·Filed 2010·Granted Apr 15, 2014·8 cites·19 claims
- 1480US10648925B2Repeater defect detectionKLA TENCOR CORP·Filed 2017·Granted May 12, 2020·3 cites·19 claims
- 1580US9766187B2Repeater detectionKLA TENCOR CORP·Filed 2015·Granted Sep 19, 2017·2 cites·22 claims
- 1680US9727047B2Defect detection using structural informationKLA TENCOR CORP·Filed 2015·Granted Aug 8, 2017·3 cites·18 claims
- 1774US10714327B2System and method for pumping laser sustained plasma and enhancing selected wavelengths of output illuminationKLA TENCOR CORP·Filed 2019·Granted Jul 14, 2020·1 cites·44 claims
- 1872US9709811B2System and method for separation of pump light and collected light in a laser pumped light sourceKLA TENCOR CORP·Filed 2014·Granted Jul 18, 2017·2 cites·49 claims
- 1969US2021231292A1Plasma Cell for Providing VUV Filtering in a Laser-Sustained Plasma Light SourceKLA CORP·Filed 2021·Application pending·0 cites
- 2064US7894659B2Methods for accurate identification of an edge of a care area for an array area formed on a wafer and methods for binning defects detected in an array area formed on a waferKLA TENCOR TECH CORP·Filed 2007·Granted Feb 22, 2011·3 cites·17 claims
- 2161US10976025B2Plasma cell for providing VUV filtering in a laser-sustained plasma light sourceKLA TENCOR CORP·Filed 2018·Granted Apr 13, 2021·0 cites·8 claims
- 2260US8213705B2Methods for accurate identification of an edge of a care area for an array area formed on a wafer and methods for binning defects detected in an array area formed on a waferCHEN CHIEN-HUEI ADAM·Filed 2011·Granted Jul 3, 2012·1 cites·20 claims
- 2358US11139216B2System, method and non-transitory computer readable medium for tuning sensitivities of, and determining a process window for, a modulated waferKLA TENCOR CORP·Filed 2020·Granted Oct 5, 2021·0 cites·11 claims
- 2457US2024161272A1Multimode defect detectionKLA CORP·Filed 2023·Application pending·0 cites
- 2556US11204332B2Repeater defect detectionKLA TENCOR CORP·Filed 2020·Granted Dec 21, 2021·0 cites·19 claims
- 2656US10520741B2System and method for separation of pump light and collected light in a laser pumped light sourceKLA TENCOR CORP·Filed 2017·Granted Dec 31, 2019·0 cites·20 claims
- 2754US10714307B2Neutral atom imaging systemKLA TENCOR CORP·Filed 2018·Granted Jul 14, 2020·0 cites·23 claims
- 2851US10679909B2System, method and non-transitory computer readable medium for tuning sensitivies of, and determining a process window for, a modulated waferKLA TENCOR CORP·Filed 2017·Granted Jun 9, 2020·0 cites·9 claims
- 2949US11328411B2Print check repeater defect detectionKLA CORP·Filed 2021·Granted May 10, 2022·0 cites·21 claims
- 3047US11138722B2Differential imaging for single-path optical wafer inspectionKLA TENCOR CORP·Filed 2018·Granted Oct 5, 2021·0 cites·19 claims
- 3136US9053390B2Automated inspection scenario generationMAHADEVAN MOHAN·Filed 2012·Granted Jun 9, 2015·0 cites·17 claims
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