Inventor · disambiguated record

Sehn Thach

Also filed as: THACH SEHN

2 granted patents·3 citations·filing 2013–2013

45Inventor score

Technology areasH10P

Files withAPPLIED MATERIALS INC2

Top patents by PatentIndex Score

2 records

0168US9948214B2High temperature electrostatic chuck with real-time heat zone regulating capabilityAPPLIED MATERIALS INC·Filed 2013·Granted Apr 17, 2018·2 cites·21 claims
0262US9580806B2Method of processing a substrate support assemblyAPPLIED MATERIALS INC·Filed 2013·Granted Feb 28, 2017·1 cites·13 claims

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