Inventor · disambiguated record
George Andrew Antonelli
Also filed as: ANTONELLI GEORGE A · ANTONELLI GEORGE ANDREW
40 granted patents·24 pending applications·1,483 citations·filing 2004–2025
98Inventor score
Files withLAM RES CORP19ONTO INNOVATION INC15NOVELLUS SYSTEMS INC9ANTONELLI GEORGE ANDREW5RANGARAJAN VISHWANATHAN3
Top patents by PatentIndex Score
64 records- 0198US11209729B2Vacuum-integrated hardmask processes and apparatusLAM RES CORP·Filed 2019·Granted Dec 28, 2021·21 cites·14 claims
- 0298US10831096B2Vacuum-integrated hardmask processes and apparatusLAM RES CORP·Filed 2018·Granted Nov 10, 2020·34 cites·18 claims
- 0398US10514598B2Vacuum-integrated hardmask processes and apparatusLAM RES CORP·Filed 2017·Granted Dec 24, 2019·33 cites·10 claims
- 0498US9778561B2Vacuum-integrated hardmask processes and apparatusLAM RES CORP·Filed 2015·Granted Oct 3, 2017·380 cites·9 claims
- 0598US8557712B1PECVD flowable dielectric gap fillANTONELLI GEORGE ANDREW·Filed 2008·Granted Oct 15, 2013·556 cites·21 claims
- 0698US7648899B1Interfacial layers for electromigration resistance improvement in damascene interconnectsNOVELLUS SYSTEMS INC·Filed 2008·Granted Jan 19, 2010·78 cites·27 claims
- 0797US8846525B2Hardmask materialsNOVELLUS SYSTEMS INC·Filed 2013·Granted Sep 30, 2014·21 cites·7 claims
- 0897US7858510B1Interfacial layers for electromigration resistance improvement in damascene interconnectsNOVELLUS SYSTEMS INC·Filed 2010·Granted Dec 28, 2010·50 cites·22 claims
- 0996US11162897B2Optical metrology device using numerical aperture reductionONTO INNOVATION INC·Filed 2020·Granted Nov 2, 2021·9 cites·17 claims
- 1094US10901241B1Optical metrology system using infrared wavelengthsONTO INNOVATION INC·Filed 2019·Granted Jan 26, 2021·10 cites·45 claims
- 1194US8741394B2In-situ deposition of film stacksHAVERKAMP JASON·Filed 2010·Granted Jun 3, 2014·25 cites·12 claims
- 1294US8288292B2Depositing conformal boron nitride film by CVD without plasmaANTONELLI GEORGE ANDREW·Filed 2010·Granted Oct 16, 2012·16 cites·30 claims
- 1394US8247332B2Hardmask materialsRANGARAJAN VISHWANATHAN·Filed 2009·Granted Aug 21, 2012·20 cites·13 claims
- 1494US8217513B2Remote plasma processing of interface surfacesANTONELLI GEORGE ANDREW·Filed 2011·Granted Jul 10, 2012·24 cites·19 claims
- 1594US8084339B2Remote plasma processing of interface surfacesANTONELLI GEORGE ANDREW·Filed 2009·Granted Dec 27, 2011·29 cites·16 claims
- 1693US10775149B1Light source failure identification in an optical metrology deviceONTO INNOVATION INC·Filed 2019·Granted Sep 15, 2020·7 cites·21 claims
- 1793US8709551B2Smooth silicon-containing filmsFOX KEITH·Filed 2010·Granted Apr 29, 2014·25 cites·23 claims
- 1893US8178443B2Hardmask materialsRANGARAJAN VISHWANATHAN·Filed 2009·Granted May 15, 2012·18 cites·21 claims
- 1992US10049921B2Method for selectively sealing ultra low-k porous dielectric layer using flowable dielectric film formed from vapor phase dielectric precursorLAM RES CORP·Filed 2014·Granted Aug 14, 2018·15 cites·19 claims
- 2092US9865501B2Method and apparatus for remote plasma treatment for reducing metal oxides on a metal seed layerLAM RES CORP·Filed 2013·Granted Jan 9, 2018·6 cites·19 claims
- 2191US9337068B2Oxygen-containing ceramic hard masks and associated wet-cleansLAM RES CORP·Filed 2013·Granted May 10, 2016·13 cites·16 claims
- 2291US9245739B2Low-K oxide deposition by hydrolysis and condensationLAM RES CORP·Filed 2014·Granted Jan 26, 2016·14 cites·20 claims
- 2391US2025053080A1Vacuum-integrated hardmask processes and apparatusLAM RES CORP·Filed 2024·Application pending·0 cites
- 2490US11808715B2Target for optical measurement of trenchesONTO INNOVATION INC·Filed 2021·Granted Nov 7, 2023·2 cites·30 claims
- 2589US8268722B2Interfacial capping layers for interconnectsYU JENGYI·Filed 2010·Granted Sep 18, 2012·13 cites·23 claims
- 2688US10288408B2Scanning white-light interferometry system for characterization of patterned semiconductor featuresNANOMETRICS INC·Filed 2016·Granted May 14, 2019·5 cites·35 claims
- 2788US10214816B2PECVD apparatus for in-situ deposition of film stacksNOVELLUS SYSTEMS INC·Filed 2014·Granted Feb 26, 2019·6 cites·9 claims
- 2885US9028924B2In-situ deposition of film stacksNOVELLUS SYSTEMS INC·Filed 2012·Granted May 12, 2015·7 cites·14 claims
- 2985US2025327737A1Opto-acoustic microscopy using an instantaneous signal difference between signals from two discrete delay times acquired with a single probe beamONTO INNOVATION INC·Filed 2024·Application pending·0 cites
- 3084US2023273516A1Vacuum-integrated hardmask processes and apparatusLAM RES CORP·Filed 2023·Application pending·0 cites
- 3184US2023266662A1Vacuum-integrated hardmask processes and apparatusLAM RES CORP·Filed 2023·Application pending·0 cites
- 3283US12385138B2Plasma-enhanced deposition of film stacksNOVELLUS SYSTEMS INC·Filed 2023·Granted Aug 12, 2025·0 cites·11 claims
- 3383US7799671B1Interfacial layers for electromigration resistance improvement in damascene interconnectsNOVELLUS SYSTEMS INC·Filed 2009·Granted Sep 21, 2010·11 cites·21 claims
- 3482US8479683B2Apparatus including a plasma chamber and controller including instructions for forming a boron nitride layerANTONELLI GEORGE ANDREW·Filed 2012·Granted Jul 9, 2013·4 cites·1 claims
- 3581US10037905B2UV and reducing treatment for K recovery and surface clean in semiconductor processingVARADARAJAN BHADRI·Filed 2009·Granted Jul 31, 2018·7 cites·5 claims
- 3681US9502255B2Low-k damage repair and pore sealing agents with photosensitive end groupsLAM RES CORP·Filed 2014·Granted Nov 22, 2016·4 cites·16 claims
- 3781US2025327924A1On-the-fly opto-acoustic microscopyONTO INNOVATION INC·Filed 2024·Application pending·0 cites
- 3879US2022075260A1Vacuum-integrated hardmask processes and apparatusLAM RES CORP·Filed 2021·Application pending·0 cites
- 3979US2025327758A1Metrology based on time resolved non-acoustic signalsONTO INNOVATION INC·Filed 2024·Application pending·0 cites
- 4078US9070750B2Methods for reducing metal oxide surfaces to modified metal surfaces using a gaseous reducing environmentNOVELLUS SYSTEMS INC·Filed 2013·Granted Jun 30, 2015·7 cites·20 claims
- 4168US7019845B1Measuring elastic moduli of dielectric thin films using an optical metrology systemRUDOLPH TECHNOLOGIES INC·Filed 2004·Granted Mar 28, 2006·10 cites·36 claims
- 4265US8536073B2Hardmask materialsRANGARAJAN VISHWANATHAN·Filed 2012·Granted Sep 17, 2013·3 cites·15 claims
- 4365US2024329005A1Multi pump-probe encoding-decoding for opto-acoustic metrologyONTO INNOVATION INC·Filed 2024·Application pending·0 cites
- 4463US11874229B2Apparatus and method for multiple source excitation Raman spectroscopyONTO INNOVATION INC·Filed 2022·Granted Jan 16, 2024·0 cites·20 claims
- 4562US2024337627A1System and method for fast microscopyONTO INNOVATION INC·Filed 2024·Application pending·0 cites
- 4660US12474643B2System and method for performing alignment and overlay measurement through an opaque layerONTO INNOVATION INC·Filed 2021·Granted Nov 18, 2025·0 cites·23 claims
- 4758US2025189446A1System and method for performing characterization of a sample using multi-wavelength laser acousticsONTO INNOVATION INC·Filed 2022·Application pending·0 cites
- 4853US2016138160A1Reactive ultraviolet thermal processing of low dielectric constant materialsLAM RES CORP·Filed 2014·Application pending·0 cites
- 4950US11668644B2Opto-acoustic measurement of a transparent film stackONTO INNOVATION INC·Filed 2021·Granted Jun 6, 2023·0 cites·20 claims
- 5050US2018350670A1Method and apparatus for remote plasma treatment for reducing metal oxides on a metal seed layerLAM RES CORP·Filed 2017·Application pending·0 cites
Showing the top 50 of 64 patent records by PatentIndex Score.
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