Inventor · disambiguated record
Gertrud Falk
Also filed as: FALK GERTRUD
8 granted patents·1 pending application·366 citations·filing 1984–2003
86Inventor score
Top patents by PatentIndex Score
9 records- 0196US6893972B2Process for sidewall amplification of resist structures and for the production of structures having reduced structure sizeINFINEON TECHNOLOGIES AG·Filed 2002·Granted May 17, 2005·280 cites·12 claims
- 0279US4551609ASpectrometry plasma burnerSIEMENS AG·Filed 1984·Granted Nov 5, 1985·37 cites·7 claims
- 0362US6770423B2Negative resist process with simultaneous development and silylationINFINEON TECHNOLOGIES AG·Filed 2002·Granted Aug 3, 2004·7 cites·8 claims
- 0461US6042993APhotolithographic structure generation processSIEMENS AG·Filed 1996·Granted Mar 28, 2000·35 cites·15 claims
- 0558US6841332B2Photoresist compound and method for structuring a photoresist layerINFINEON TECHNOLOGIES AG·Filed 2002·Granted Jan 11, 2005·5 cites·21 claims
- 0647US6946236B2Negative resist process with simultaneous development and aromatization of resist structuresINFINEON TECHNOLOGIES AG·Filed 2002·Granted Sep 20, 2005·2 cites·8 claims
- 0735US7018784B2Process for increasing the etch resistance and for reducing the hole and trench width of a photoresist structure using solvent systems of low polarityINFINEON TECHNOLOGIES AG·Filed 2003·Granted Mar 28, 2006·0 cites·19 claims
- 0834US2003096194A1Silylating process for photoresists in the UV regionFiled 2002·Application pending·0 cites
- 0928US6899997B2Process for modifying resist structures and resist films from the aqueous phaseINFINEON TECHNOLOGIES AG·Filed 2003·Granted May 31, 2005·0 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →