Inventor · disambiguated record
Carey Thiel
Also filed as: THIEL CAREY W
2 granted patents·4 pending applications·22 citations·filing 2003–2007
60Inventor score
Top patents by PatentIndex Score
6 records- 0167US7049035B2Method for controlling linewidth in advanced lithography masks using electrochemistryIBM·Filed 2003·Granted May 23, 2006·11 cites·19 claims
- 0265US7198872B2Light scattering EUVL maskIBM·Filed 2004·Granted Apr 3, 2007·11 cites·48 claims
- 0354US2008093342A1Etching apparatus for semicondutor fabricationDALTON TIMOTHY J·Filed 2007·Application pending·0 cites
- 0449US2006191638A1Etching apparatus for semiconductor fabricationIBM·Filed 2005·Application pending·0 cites
- 0534US2006199082A1Mask repairIBM·Filed 2005·Application pending·0 cites
- 0631US2004131947A1Reflective mask structure and method of formationIBM·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →