Inventor · disambiguated record
Hideto Uchijima
Also filed as: UCHIJIMA HIDETO
1 granted patent·3 pending applications·4 citations·filing 2004–2007
24Inventor score
Technology areasC23C
Files withMATSUSHITA ELECTRIC INDUSTRIAL CO LTD4
Top patents by PatentIndex Score
4 records- 0176US7368398B2Substrate processing apparatus and substrate processing methodMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2005·Granted May 6, 2008·4 cites·16 claims
- 0258US2008283086A1Substrate processing apparatus and cleaning method thereforMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2007·Application pending·0 cites
- 0347US2005145170A1Substrate processing apparatus and cleaning method thereforMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2004·Application pending·0 cites
- 0445US2006086318A1Gas diffusion plateMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →