Inventor · disambiguated record
Wayne Lougher
Also filed as: LOUGHER WAYNE · LOUGHER WAYNE F
3 granted patents·1 pending application·72 citations·filing 2000–2001
73Inventor score
Technology areasB24B
Files withSPEEDFAM IPEC CORP4
Top patents by PatentIndex Score
4 records- 0187US6409580B1Rigid polishing pad conditioner for chemical mechanical polishing toolSPEEDFAM IPEC CORP·Filed 2001·Granted Jun 25, 2002·38 cites·19 claims
- 0278US6758939B2Laminated wear ringSPEEDFAM IPEC CORP·Filed 2001·Granted Jul 6, 2004·22 cites·18 claims
- 0360US6736713B2Workpiece carrier retaining elementSPEEDFAM IPEC CORP·Filed 2001·Granted May 18, 2004·12 cites·13 claims
- 0434US2002077049A1Reinforced CMP carrier bladdersSPEEDFAM IPEC CORP·Filed 2000·Application pending·0 cites
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