Inventor · disambiguated record
Steve Slonaker
Also filed as: SLONAKER STEVE
2 granted patents·44 citations·filing 2001–2002
62Inventor score
Files withNIKON PREC INC2
Top patents by PatentIndex Score
2 records- 0186US6664121B2Method and apparatus for position measurement of a pattern formed by a lithographic exposure toolNIKON PREC INC·Filed 2002·Granted Dec 16, 2003·38 cites·30 claims
- 0251US6538753B2Method and apparatus for dimension measurement of a pattern formed by lithographic exposure toolsNIKON PREC INC·Filed 2001·Granted Mar 25, 2003·6 cites·60 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →