Inventor · disambiguated record
Dana L. Andrews
Also filed as: ANDREWS DANA · ANDREWS DANA L
5 granted patents·1,093 citations·filing 1988–1994
88Inventor score
Technology areasH10P
Files withAPPLIED MATERIALS INC5
Top patents by PatentIndex Score
5 records- 0197US4842683AMagnetic field-enhanced plasma etch reactorAPPLIED MATERIALS INC·Filed 1988·Granted Jun 27, 1989·410 cites·16 claims
- 0296US5228501APhysical vapor deposition clamping mechanism and heater/coolerAPPLIED MATERIALS INC·Filed 1992·Granted Jul 20, 1993·357 cites·24 claims
- 0393US5215619AMagnetic field-enhanced plasma etch reactorAPPLIED MATERIALS INC·Filed 1991·Granted Jun 1, 1993·194 cites·25 claims
- 0481US5226632ASlit valve apparatus and methodAPPLIED MATERIALS INC·Filed 1992·Granted Jul 13, 1993·80 cites·21 claims
- 0573US5484011AMethod of heating and cooling a wafer during semiconductor processingAPPLIED MATERIALS INC·Filed 1994·Granted Jan 16, 1996·52 cites·8 claims
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