Inventor · disambiguated record
Ian T. Kohl
Also filed as: KOHL IAN T · KOHL IAN THOMAS
4 granted patents·15 citations·filing 2005–2013
75Inventor score
Technology areasG01N
Top patents by PatentIndex Score
4 records- 0191US7623227B2System and method for inspecting a workpiece surface using polarization of scattered lightKLA TENCOR CORP·Filed 2005·Granted Nov 24, 2009·11 cites·20 claims
- 0281US8059268B2Inspecting a workpiece using polarization of scattered lightJUDELL NEIL·Filed 2009·Granted Nov 15, 2011·3 cites·2 claims
- 0378US8537350B2Inspecting a workpiece using scattered lightJUDELL NEIL·Filed 2011·Granted Sep 17, 2013·1 cites·3 claims
- 0469US9518930B2Scattered light measurement systemKLA TENCOR CORP·Filed 2013·Granted Dec 13, 2016·0 cites·3 claims
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