Inventor · disambiguated record

Mei-Wei Wu

Also filed as: WU MEI-WEI

1 granted patent·3 citations·filing 2013–2013

20Inventor score

Technology areasH10P

Files withTAIWAN SEMICONDUCTOR MFG CO LTD1

Top patents by PatentIndex Score

1 record

0164US9691640B2Mechanisms for cleaning load ports of semiconductor process toolsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Jun 27, 2017·3 cites·20 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →