Inventor · disambiguated record
Volker Mattern
Also filed as: MATTERN VOLKER
2 granted patents·25 citations·filing 1991–1992
61Inventor score
Technology areasH10P
Files withIBM2
Top patents by PatentIndex Score
2 records- 0148US5296091AMethod of etching substrates having a low thermal conductivityIBM·Filed 1991·Granted Mar 22, 1994·17 cites·6 claims
- 0236US5304278AApparatus for plasma or reactive ion etching and method of etching substrates having a low thermal conductivityIBM·Filed 1992·Granted Apr 19, 1994·8 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →