Inventor · disambiguated record
Michelle T. Schulberg
Also filed as: SCHULBERG MICHELLE · SCHULBERG MICHELLE T
6 granted patents·1 pending application·1,458 citations·filing 2000–2005
90Inventor score
Files withNOVELLUS SYSTEMS INC6
Top patents by PatentIndex Score
7 records- 0198US7589028B1Hydroxyl bond removal and film densification method for oxide films using microwave post treatmentNOVELLUS SYSTEMS INC·Filed 2005·Granted Sep 15, 2009·424 cites·25 claims
- 0298US7208389B1Method of porogen removal from porous low-k films using UV radiationNOVELLUS SYSTEMS INC·Filed 2003·Granted Apr 24, 2007·602 cites·38 claims
- 0397US6576345B1Dielectric films with low dielectric constantsNOVELLUS SYSTEMS INC·Filed 2000·Granted Jun 10, 2003·110 cites·45 claims
- 0497US6340628B1Method to deposit SiOCH films with dielectric constant below 3.0NOVELLUS SYSTEMS INC·Filed 2000·Granted Jan 22, 2002·166 cites·22 claims
- 0595US7176144B1Plasma detemplating and silanol capping of porous dielectric filmsNOVELLUS SYSTEMS INC·Filed 2004·Granted Feb 13, 2007·128 cites·41 claims
- 0689US6951765B1Method and apparatus for introduction of solid precursors and reactants into a supercritical fluid reactorNOVELLUS SYSTEMS INC·Filed 2001·Granted Oct 4, 2005·28 cites·15 claims
- 0736US2004096586A1System for deposition of mesoporous materialsFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →